Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11515121 | Electron beam device | Tomohiko Ogata, Hisaya Murakoshi, Masaki Hasegawa, Katsunori Onuki | 2022-11-29 |
| 11193895 | Semiconductor substrate for evaluation and method using same to evaluate defect detection sensitivity of inspection device | Kentaro OHIRA, Masaki Hasegawa, Tomohiko Ogata, Katsunori Onuki | 2021-12-07 |
| 11107655 | Charged particle beam device | Tomohiko Ogata, Masaki Hasegawa, Katsunori Onuki, Hisaya Murakoshi | 2021-08-31 |
| 11002687 | Defect inspection method and defect inspection device | Masaki Hasegawa, Katsunori Onuki, Hisaya Murakoshi, Tomohiko Ogata | 2021-05-11 |
| 10923315 | Charged particle beam apparatus, and method of adjusting charged particle beam apparatus | Masaki Hasegawa, Tomohiko Ogata, Hisaya Murakoshi, Katsunori Onuki | 2021-02-16 |
| 10522320 | Charged particle beam device and method for adjusting charged particle beam device | Tomohiko Ogata, Masaki Hasegawa, Hisaya Murakoshi, Katsunori Onuki | 2019-12-31 |
| 8779400 | Ion source, ion beam processing/observation apparatus, charged particle beam apparatus, and method for observing cross section of sample | Hiroyasu Shichi, Satoshi Tomimatsu, Kaoru Umemura, Koji Ishiguro | 2014-07-15 |
| 8481980 | Ion source, ion beam processing/observation apparatus, charged particle beam apparatus, and method for observing cross section of sample | Hiroyasu Shichi, Satoshi Tomimatsu, Kaoru Umemura, Koji Ishiguro | 2013-07-09 |
| 8431891 | Dual beam apparatus with tilting sample stage | Hiroyasu Shichi, Satoshi Tomimatsu, Kaoru Umemura, Koji Ishiguro | 2013-04-30 |
| 7777183 | Charge particle beam system, sample processing method, and semiconductor inspection system | Kaoru Umemura, Koji Ishiguro | 2010-08-17 |
| 7700931 | Ion beam processing apparatus | Hiroyasu Shichi, Satoshi Tomimatsu, Kaoru Umemura, Koji Ishiguro | 2010-04-20 |
| 7696496 | Apparatus for ion beam fabrication | Satoshi Tomimatsu, Hiroyasu Shichi, Kaoru Umemura, Koji Ishiguro | 2010-04-13 |
| 7592606 | Manufacturing equipment using ION beam or electron beam | Koji Ishiguro, Kaoru Umemura | 2009-09-22 |
| 6094647 | Presearch type document search method and apparatus | Kanji Kato, Hiromichi Fujisawa, Mitsuo Ooyama, Hisamitsu Kawaguchi, Atsushi Hatakeyama +4 more | 2000-07-25 |
| 5659174 | Scanning electron microscope | Kaneo Kageyama, Atushi Mouri, Junji Takada | 1997-08-19 |
| 5519857 | Hierarchical presearch type text search method and apparatus and magnetic disk unit used in the apparatus | Kanji Kato, Hiromichi Fujisawa, Mitsuo Ooyama, Hisamitsu Kawaguchi, Atsushi Hatakeyama +4 more | 1996-05-21 |
| 5168533 | Hierarchical presearch type text search method and apparatus and magnetic disk unit used in the apparatus | Kanji Kato, Hiromichi Fujisawa, Mitsuo Ooyama, Hisamitsu Kawaguchi, Atsushi Hatakeyama +4 more | 1992-12-01 |