Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7598497 | Charged particle beam scanning method and charged particle beam apparatus | Kouichi Yamamoto | 2009-10-06 |
| 6693288 | Charged particle beam irradiation apparatus and irradiation method using the apparatus | — | 2004-02-17 |
| 6323498 | Charged particle beam irradiation apparatus and irradiation method using the apparatus | — | 2001-11-27 |
| 5659174 | Scanning electron microscope | Noriyuki Kaneoka, Atushi Mouri, Junji Takada | 1997-08-19 |