Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6768113 | WORKPIECE HOLDER, SEMICONDUCTOR FABRICATING APPARATUS, SEMICONDUCTOR INSPECTING APPARATUS, CIRCUIT PATTERN INSPECTING APPARATUS, CHARGED PARTICLE BEAM APPLICATION APPARATUS, CALIBRATING SUBSTRATE, WORKPIECE HOLDING METHOD, CIRCUIT PATTERN INSPECTING METHOD, AND CHARGED PARTICLE BEAM APPLICATION METHOD | Hiroyuki Suzuki, Hiroyuki Shinada, Atsuko Takafuji, Yasutsugu Usami | 2004-07-27 |
| 6509564 | WORKPIECE HOLDER, SEMICONDUCTOR FABRICATING APPARATUS, SEMICONDUCTOR INSPECTING APPARATUS, CIRCUIT PATTERN INSPECTING APPARATUS, CHARGED PARTICLE BEAM APPLICATION APPARATUS, CALIBRATING SUBSTRATE, WORKPIECE HOLDING METHOD, CIRCUIT PATTERN INSPECTING METHOD, AND CHARGED PARTICLE BEAM APPLICATION METHOD | Hiroyuki Suzuki, Hiroyuki Shinada, Atsuko Takafuji, Yasutsugu Usami | 2003-01-21 |
| 5851381 | Method of refining crude oil | Meishi Tanaka | 1998-12-22 |
| 5214493 | Reduction exposure apparatus with correction for alignment light having inhomogeneous intensity distribution | Yoshimitsu Saze, Katsunori Onuki | 1993-05-25 |
| 5164789 | Method and apparatus for measuring minute displacement by subject light diffracted and reflected from a grating to heterodyne interference | Yasuhiro Yoshitake, Yoshitada Oshida, Soichi Katagiri, Yoshimitsu Saze | 1992-11-17 |
| 4941745 | Projection aligner for fabricating semiconductor device having projection optics | — | 1990-07-17 |
| 4690529 | Optical exposer | Shuji Syohda, Shinji Kuniyoshi | 1987-09-01 |
| 4615614 | Optical exposure apparatus | — | 1986-10-07 |
| 4477182 | Pattern exposing apparatus | Akihiro Takanashi, Norikazu Hashimoto, Hisashi Maejima | 1984-10-16 |