Issued Patents All Time
Showing 25 most recent of 61 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10955361 | Defect inspection apparatus and pattern chip | Yuta Urano, Toshifumi Honda, Akio Yazaki, Yukihiro Shibata, Hideki Fukushima | 2021-03-23 |
| 10948424 | Defect inspection device, pattern chip, and defect inspection method | Yuta Urano, Yukihiro Shibata, Toshifumi Honda, Hideki Fukushima | 2021-03-16 |
| 10853959 | Optical inspection tool and method | Taiki Murata, Satoshi Shigematsu | 2020-12-01 |
| 8982332 | Distance measuring device and distance measuring method | Takehiro Tachizaki, Masahiro Watanabe, Tatsuo Hariyama, Tetsuya Matsui, Hirokazu Matsumoto +1 more | 2015-03-17 |
| 8736830 | Pattern inspection device of substrate surface and pattern inspection method of the same | Masahiro Watanabe, Toshihiko Nakata, Hideaki Sasazawa, Minoru Yoshida | 2014-05-27 |
| 8730471 | DUV-UV band spectroscopic optical system and spectrometer using same | Keiko Oka | 2014-05-20 |
| 8705024 | Wavefront aberration measuring method and device therefor | Minoru Yoshida, Keiko Oka | 2014-04-22 |
| 8660336 | Defect inspection system | Taketo Ueno | 2014-02-25 |
| 8659761 | Method and apparatus for measuring displacement of a sample using a wire grid polarizer to generate interference light | Toshihiko Nakata, Masahiro Watanabe, Shuichi Baba, Mineo Nomoto | 2014-02-25 |
| 8553216 | Defect inspection device using catadioptric objective lens | Keiko Yoshimizu | 2013-10-08 |
| 8553214 | Method and equipment for detecting pattern defect | Hiroaki Shishido, Toshihiko Nakata, Shunji Maeda, Minoru Yoshida, Sachio Uto | 2013-10-08 |
| 8416402 | Method and apparatus for inspecting defects | Yukihiro Shibata | 2013-04-09 |
| 8416292 | Defect inspection apparatus and method | Yukihiro Shibata | 2013-04-09 |
| 8411264 | Method and apparatus for inspecting defects | Takeo Ueno, Hiroyuki Nakano | 2013-04-02 |
| 8279431 | Spectral detection method and device, and defect inspection method and apparatus using the same | Takenori Hirose, Minoru Yoshida, Hideaki Sasazawa | 2012-10-02 |
| 8275189 | Defect inspection system | Taketo Ueno | 2012-09-25 |
| 8259414 | Magnetic recording disk having aligning pattern and method for aligning thereof | Takenori Hirose | 2012-09-04 |
| 8227265 | Method of measuring pattern shape, method of manufacturing semiconductor device, and process control system | Kana Nemoto, Shunichi Matsumoto | 2012-07-24 |
| 8203706 | Method and apparatus for inspecting defects | Yukihiro Shibata | 2012-06-19 |
| 8148705 | Method and apparatus for inspecting defects of patterns formed on a hard disk medium | Takenori Hirose, Masahiro Watanabe | 2012-04-03 |
| 8121398 | Method and apparatus for inspecting defects | Hiroyuki Nakano, Yukihiro Shibata | 2012-02-21 |
| 8064066 | Method and apparatus for measuring displacement of a sample to be inspected using an interference light | Toshihiko Nakata, Masahiro Watanabe, Shuichi Baba, Mineo Nomoto | 2011-11-22 |
| 8045146 | Method and apparatus for reviewing defect | Keiya Saito, Shunichi Matsumoto, Hidetoshi Nishiyama | 2011-10-25 |
| 7894029 | Apparatus for optically arranging surface of alignment film and method for manufacturing liquid crystal display device using the same | Takeshi Arai, Shigeru Matsuyama | 2011-02-22 |
| 7881520 | Defect inspection system | Taketo Ueno | 2011-02-01 |