Issued Patents All Time
Showing 1–25 of 89 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12153338 | Mask blank, method for manufacturing transfer mask, and method for manufacturing semiconductor device | Ryo Ohkubo, Osamu Nozawa | 2024-11-26 |
| 12013631 | Mask blank, transfer mask, and method for manufacturing semiconductor device | — | 2024-06-18 |
| 12007684 | Mask blank, method of manufacturing imprint mold, method of manufacturing transfer mask, method of manufacturing reflective mask, and method of manufacturing semiconductor device | Osamu Nozawa, Ryo Ohkubo | 2024-06-11 |
| 11762279 | Mask blank, method for manufacturing reflective mask, and method for manufacturing semiconductor device | Osamu Nozawa, Ryo Ohkubo | 2023-09-19 |
| 11720014 | Mask blank, phase shift mask, and method of manufacturing semiconductor device | Hitoshi Maeda, Osamu Nozawa | 2023-08-08 |
| 11698360 | Chirality detection device, chirality detection method, separation device, separation method, and chiral substance device | Yoshihiko Togawa, Hiroshi Yamamoto | 2023-07-11 |
| 11630388 | Mask blank, method for manufacturing phase shift mask, and method for manufacturing semiconductor device | Osamu Nozawa, Ryo Ohkubo | 2023-04-18 |
| 11624979 | Mask blank, transfer mask, and method of manufacturing semiconductor device | Kazutake TANIGUCHI | 2023-04-11 |
| 11543744 | Mask blank, transfer mask, and method for manufacturing semiconductor device | — | 2023-01-03 |
| 11442357 | Mask blank, phase-shift mask, and method of manufacturing semiconductor device | Hitoshi Maeda, Masahiro Hashimoto | 2022-09-13 |
| 11435662 | Mask blank, method for manufacturing transfer mask, and method for manufacturing semiconductor device | Ryo Ohkubo, Takashi Uchida | 2022-09-06 |
| 11314162 | Mask blank, transfer mask, and method of manufacturing semiconductor device | Kazutake TANIGUCHI | 2022-04-26 |
| 11314161 | Mask blank, phase shift mask, and method of manufacturing semiconductor device | Kazutake TANIGUCHI | 2022-04-26 |
| 11281089 | Mask blank, method for manufacturing transfer mask, and method for manufacturing semiconductor device | Osamu Nozawa, Ryo Ohkubo | 2022-03-22 |
| 11231645 | Mask blank, method for manufacturing transfer mask, and method for manufacturing semiconductor device | Osamu Nozawa | 2022-01-25 |
| 11226549 | Mask blank, phase shift mask, method for manufacturing thereof, and method for manufacturing semiconductor device | Osamu Nozawa | 2022-01-18 |
| 11119400 | Mask blank, method for manufacturing transfer mask, and method for manufacturing semiconductor device | Ryo Ohkubo, Takashi Uchida | 2021-09-14 |
| 11119399 | Mask blank, phase shift mask and method for manufacturing semiconductor device | Atsushi Matsumoto, Takashi Uchida | 2021-09-14 |
| 11112690 | Mask blank, transfer mask, and method for manufacturing semiconductor device | — | 2021-09-07 |
| 11054735 | Mask blank, phase shift mask, method for manufacturing phase shift mask, and method for manufacturing semiconductor device | Takenori Kajiwara, Ryo Ohkubo, Osamu Nozawa | 2021-07-06 |
| 11048160 | Mask blank, phase shift mask and method for manufacturing semiconductor device | Masahiro Hashimoto | 2021-06-29 |
| 10942442 | Mask blank, phase-shift mask, and method of manufacturing semiconductor device | Osamu Nozawa, Kazuya Sakai | 2021-03-09 |
| 10942441 | Mask blank, phase shift mask, and method for manufacturing semiconductor device | Osamu Nozawa, Takenori Kajiwara | 2021-03-09 |
| 10935881 | Mask blank, phase shift mask, phase shift mask manufacturing method, and semiconductor device manufacturing method | Takenori Kajiwara, Osamu Nozawa | 2021-03-02 |
| 10915016 | Mask blank, method for manufacturing phase shift mask, and method for manufacturing semiconductor device | Osamu Nozawa, Ryo Ohkubo | 2021-02-09 |