Issued Patents All Time
Showing 1–25 of 76 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11442357 | Mask blank, phase-shift mask, and method of manufacturing semiconductor device | Hitoshi Maeda, Hiroaki Shishido | 2022-09-13 |
| 11061316 | Mask blank, transfer mask, method of manufacturing a transfer mask, and method of manufacturing a semiconductor device | Mariko Uchida, Isao Kawasumi | 2021-07-13 |
| 11048160 | Mask blank, phase shift mask and method for manufacturing semiconductor device | Hiroaki Shishido | 2021-06-29 |
| 10042247 | Mask blank, method for manufacturing mask blank and transfer mask | Takahiro Hiromatsu, Yasushi Sakaida, Ryuta MIZUOCHI, Rikimaru Sakamoto, Masaki Nagai | 2018-08-07 |
| 9927697 | Mask blank, method of manufacturing mask blank and method of manufacturing transfer mask | Takahiro Hiromatsu | 2018-03-27 |
| 9746764 | Mask blank and transfer mask | Takahiro Hiromatsu, Yasushi Sakaida, Ryuta MIZUOCHI, Rikimaru Sakamoto, Masaki Nagai | 2017-08-29 |
| 9651859 | Mask blank, transfer mask and method of manufacturing transfer mask | Atsushi Kominato, Hiroyuki Iwashita, Osamu Nozawa | 2017-05-16 |
| 9612527 | Mask blank, transfer mask, method of manufacturing a transfer mask, and method of manufacturing a semiconductor device | Atsushi Kominato, Osamu Nozawa | 2017-04-04 |
| 9535320 | Mask blank, method of manufacturing the same, transfer mask, and method of manufacturing the same | Kazuya Sakai | 2017-01-03 |
| 9469740 | Carbon-fiber-reinforced plastic and process for producing same | Takafumi Hashimoto, Hirohito Minowa, Takashi Shimada, Katsuhiro Miyoshi, Yoshihiro Naruse | 2016-10-18 |
| 9389501 | Photomask blank, method of manufacturing the same, photomask, and method of manufacturing the same | Toshiyuki Suzuki, Hiroyuki Iwashita | 2016-07-12 |
| 9372393 | Mask blank, transfer mask, method of manufacturing a transfer mask, and method of manufacturing a semiconductor device | Atsushi Kominato, Osamu Nozawa, Hiroyuki Iwashita | 2016-06-21 |
| 9256122 | Mask blank, transfer mask, method of manufacturing a transfer mask, and method of manufacturing a semiconductor device | Atsushi Kominato, Osamu Nozawa | 2016-02-09 |
| 9195133 | Mask blank, transfer mask and method of manufacturing transfer mask | Atsushi Kominato, Hiroyuki Iwashita, Osamu Nozawa | 2015-11-24 |
| 9104112 | Mask blank, method of manufacturing the same, and transfer mask | Kazuya Sakai, Takeyuki Yamada | 2015-08-11 |
| 9091934 | Mask blank, method of manufacturing the same, transfer mask, and method of manufacturing the same | Kazuya Sakai | 2015-07-28 |
| 9075320 | Mask blank, transfer mask, method of manufacturing a transfer mask, and method of manufacturing a semiconductor device | Atsushi Kominato, Hiroyuki Iwashita | 2015-07-07 |
| 9075319 | Mask blank and transfer mask | Hiroyuki Iwashita, Yasushi Okubo, Osamu Nozawa | 2015-07-07 |
| 9075314 | Photomask blank, photomask, and method for manufacturing photomask blank | Hiroyuki Iwashita, Hiroaki Shishido, Atsushi Kominato, Morio Hosoya | 2015-07-07 |
| 9017902 | Mask blank, transfer mask, and method of manufacturing a transfer mask | Osamu Nozawa, Hiroyuki Iwashita, Atsushi Kominato | 2015-04-28 |
| 9005851 | Phase shift mask blank and phase shift mask | Hiroyuki Iwashita, Hiroaki Shishido, Atsushi Kominato | 2015-04-14 |
| 8940462 | Photomask blank, photomask, method of manufacturing the same, and method of manufacturing a semiconductor device | Atsushi Kominato | 2015-01-27 |
| 8883022 | Mask blank and method of manufacturing an imprinting mold | Osamu Nozawa | 2014-11-11 |
| 8865378 | Photomask blank, photomask, and methods of manufacturing the same | Hiroyuki Iwashita, Atsushi Kominato, Hiroaki Shishido | 2014-10-21 |
| 8822103 | Mask blank, transfer mask, method of manufacturing a transfer mask, and method of manufacturing a semiconductor device | Atsushi Kominato, Osamu Nozawa, Hiroyuki Iwashita | 2014-09-02 |