Issued Patents All Time
Showing 26–50 of 76 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8802334 | Surface treatment method for a mask blank, method of manufacturing a mask blank, and method of manufacturing a mask | Takeyuki Yamada, Toshiyuki Suzuki, Yasunori Yokoya | 2014-08-12 |
| 8785086 | Reflective mask blank, method of manufacturing the same, and reflective mask | Kazunori Ono, Kenta Tsukagoshi, Tooru Fukui | 2014-07-22 |
| 8697315 | Photomask blank and production method thereof, and photomask production method, and semiconductor device production method | Takeyuki Yamada, Atsushi Kominato, Hiroyuki Iwashita, Yasushi Okubo | 2014-04-15 |
| 8663876 | Photomask blank, method of manufacturing the same, photomask, and method of manufacturing the same | Toshiyuki Suzuki, Hiroyuki Iwashita | 2014-03-04 |
| 8663875 | Method of manufacturing a photomask | Yasushi Okubo, Toshiyuki Suzuki | 2014-03-04 |
| 8658334 | Transfer mask, method of manufacturing a transfer mask, and method of manufacturing a semiconductor device | Kazuya Sakai, Toshiyuki Suzuki, Kazunori Ono | 2014-02-25 |
| 8637213 | Mask blank and transfer mask | Atsushi Kominato, Hiroyuki Iwashita, Osamu Nozawa | 2014-01-28 |
| 8614035 | Phase shift mask blank, phase shift mask, and method for manufacturing phase shift mask blank | Osamu Nozawa | 2013-12-24 |
| 8574793 | Mask blank, transfer mask, method of manufacturing a transfer mask, and method of manufacturing a semiconductor device | Atsushi Kominato, Hiroyuki Iwashita | 2013-11-05 |
| 8535855 | Mask blank manufacturing method, transfer mask manufacturing method, mask blank, and transfer mask | Kazuya Sakai | 2013-09-17 |
| 8512916 | Photomask blank, photomask, and method for manufacturing photomask blank | Hiroyuki Iwashita, Hiroaki Shishido, Atsushi Kominato, Morio Hosoya | 2013-08-20 |
| 8507155 | Photomask blank, photomask, and method for manufacturing photomask blank | Hiroyuki Iwashita, Hiroaki Shishido, Atsushi Kominato | 2013-08-13 |
| 8501372 | Mask blank, transfer mask, method of manufacturing a transfer mask, and method of manufacturing a semiconductor device | Atsushi Kominato, Osamu Nozawa | 2013-08-06 |
| 8431290 | Photomask blank, photomask, and methods of manufacturing the same | Hiroyuki Iwashita, Atsushi Kominato, Hiroaki Shishido | 2013-04-30 |
| 8409772 | Mask blank and method of manufacturing a transfer mask | Hiroyuki Iwashita, Takahiro Hiromatsu | 2013-04-02 |
| 8404407 | Mask blank, mask blank manufacturing method, transfer mask, and transfer mask manufacturing method | Hiroshi Shirotori, Yuusuke Honma, Mitsuhiro Shirakura | 2013-03-26 |
| 8404406 | Photomask blank and method for manufacturing the same | Hiroyuki Iwashita, Hiroaki Shishido, Atsushi Kominato | 2013-03-26 |
| 8367276 | Mask blank and method of manufacturing mask | Yasushi Okubo, Toshiyuki Suzuki, Takayuki Ohnishi, Hirohito Anze, Hitoshi Sunaoshi +1 more | 2013-02-05 |
| 8329364 | Phase shift mask blank and phase shift mask | Hiroyuki Iwashita, Hiroaki Shishido, Atsushi Kominato | 2012-12-11 |
| 8323858 | Photomask blank, photomask, and methods of manufacturing the same | Hiroyuki Iwashita, Atsushi Kominato | 2012-12-04 |
| 8304147 | Photomask blank, photomask, and method for manufacturing photomask blank | Hiroyuki Iwashita, Hiroaki Shishido, Atsushi Kominato | 2012-11-06 |
| 8221941 | Photomask blank manufacturing method and photomask manufacturing method | Toshiyuki Suzuki, Kazunori Ono, Ryo Ohkubo, Kazuya Sakai | 2012-07-17 |
| 8216747 | Phase shift mask blank, phase shift mask, and method for manufacturing phase shift mask blank | Osamu Nozawa | 2012-07-10 |
| 8197993 | Method of manufacturing transfer mask and method of manufacturing semiconductor device | Kazuya Sakai, Toshiyuki Suzuki, Kazunori Ono | 2012-06-12 |
| 8114556 | Photomask blank and production method thereof, and photomask production method, and semiconductor device production method | Takeyuki Yamada, Atsushi Kominato, Hiroyuki Iwashita, Yasushi Okubo | 2012-02-14 |