Issued Patents All Time
Showing 1–25 of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11327396 | Mask blank | Toshiyuki Suzuki | 2022-05-10 |
| 11016382 | Mask blanks, phase shift mask, method for manufacturing phase shift mask, and method for manufacturing semiconductor device | Osamu Nozawa | 2021-05-25 |
| 10551733 | Mask blanks, phase shift mask, and method for manufacturing semiconductor device | Osamu Nozawa | 2020-02-04 |
| 9664997 | Method of manufacturing mask blank and method of manufacturing transfer mask | Hiroaki Shishido, Osamu Nozawa | 2017-05-30 |
| 9651859 | Mask blank, transfer mask and method of manufacturing transfer mask | Masahiro Hashimoto, Hiroyuki Iwashita, Osamu Nozawa | 2017-05-16 |
| 9625807 | Mask blank, transfer mask, method of manufacturing a mask blank, method of manufacturing a transfer mask and method of manufacturing a semiconductor device | Hiroaki Shishido, Osamu Nozawa, Toshiharu Kikuchi | 2017-04-18 |
| 9612527 | Mask blank, transfer mask, method of manufacturing a transfer mask, and method of manufacturing a semiconductor device | Masahiro Hashimoto, Osamu Nozawa | 2017-04-04 |
| 9372393 | Mask blank, transfer mask, method of manufacturing a transfer mask, and method of manufacturing a semiconductor device | Osamu Nozawa, Hiroyuki Iwashita, Masahiro Hashimoto | 2016-06-21 |
| 9256122 | Mask blank, transfer mask, method of manufacturing a transfer mask, and method of manufacturing a semiconductor device | Masahiro Hashimoto, Osamu Nozawa | 2016-02-09 |
| 9195133 | Mask blank, transfer mask and method of manufacturing transfer mask | Masahiro Hashimoto, Hiroyuki Iwashita, Osamu Nozawa | 2015-11-24 |
| 9075314 | Photomask blank, photomask, and method for manufacturing photomask blank | Hiroyuki Iwashita, Hiroaki Shishido, Masahiro Hashimoto, Morio Hosoya | 2015-07-07 |
| 9075320 | Mask blank, transfer mask, method of manufacturing a transfer mask, and method of manufacturing a semiconductor device | Masahiro Hashimoto, Hiroyuki Iwashita | 2015-07-07 |
| 9017902 | Mask blank, transfer mask, and method of manufacturing a transfer mask | Osamu Nozawa, Hiroyuki Iwashita, Masahiro Hashimoto | 2015-04-28 |
| 9005851 | Phase shift mask blank and phase shift mask | Hiroyuki Iwashita, Hiroaki Shishido, Masahiro Hashimoto | 2015-04-14 |
| 8940462 | Photomask blank, photomask, method of manufacturing the same, and method of manufacturing a semiconductor device | Masahiro Hashimoto | 2015-01-27 |
| 8865378 | Photomask blank, photomask, and methods of manufacturing the same | Hiroyuki Iwashita, Masahiro Hashimoto, Hiroaki Shishido | 2014-10-21 |
| 8846274 | Mask blank, transfer mask and process for manufacturing semiconductor devices | Hiroaki Shishido, Osamu Nozawa | 2014-09-30 |
| 8822103 | Mask blank, transfer mask, method of manufacturing a transfer mask, and method of manufacturing a semiconductor device | Osamu Nozawa, Hiroyuki Iwashita, Masahiro Hashimoto | 2014-09-02 |
| 8697315 | Photomask blank and production method thereof, and photomask production method, and semiconductor device production method | Takeyuki Yamada, Hiroyuki Iwashita, Masahiro Hashimoto, Yasushi Okubo | 2014-04-15 |
| 8637213 | Mask blank and transfer mask | Masahiro Hashimoto, Hiroyuki Iwashita, Osamu Nozawa | 2014-01-28 |
| 8574793 | Mask blank, transfer mask, method of manufacturing a transfer mask, and method of manufacturing a semiconductor device | Masahiro Hashimoto, Hiroyuki Iwashita | 2013-11-05 |
| 8512916 | Photomask blank, photomask, and method for manufacturing photomask blank | Hiroyuki Iwashita, Hiroaki Shishido, Masahiro Hashimoto, Morio Hosoya | 2013-08-20 |
| 8507155 | Photomask blank, photomask, and method for manufacturing photomask blank | Hiroyuki Iwashita, Hiroaki Shishido, Masahiro Hashimoto | 2013-08-13 |
| 8501372 | Mask blank, transfer mask, method of manufacturing a transfer mask, and method of manufacturing a semiconductor device | Masahiro Hashimoto, Osamu Nozawa | 2013-08-06 |
| 8431290 | Photomask blank, photomask, and methods of manufacturing the same | Hiroyuki Iwashita, Masahiro Hashimoto, Hiroaki Shishido | 2013-04-30 |