Issued Patents All Time
Showing 1–25 of 48 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12027353 | Substrate processing method and apparatus | Shota ISHIBASHI, Hiroyuki Toshima, Tatsuo Hirasawa | 2024-07-02 |
| 12014911 | Sputtering apparatus | Shota ISHIBASHI, Tatsuo Hirasawa, Hiroyuki Toshima | 2024-06-18 |
| 11742190 | Sputtering apparatus and film forming method | Einstein Noel Abarra, Hiroyuki Toshima, Shota ISHIBASHI, Tatsuo Hirasawa, Masato SHINADA | 2023-08-29 |
| 11479848 | Film forming apparatus and method | Shota ISHIBASHI, Hiroyuki Toshima, Tatsuo Hirasawa | 2022-10-25 |
| 11199040 | Rotation transmission mechanism and damper device | Takehiko Yazawa, Satoru Yokoe | 2021-12-14 |
| 11158492 | Film forming apparatus and film forming method | Hiroyuki Toshima, Tatsuo Hirasawa | 2021-10-26 |
| 10942440 | Mask blank, phase shift mask, method of manufacturing phase shift mask, and method of manufacturing semiconductor device | Atsushi Matsumoto, Osamu Nozawa | 2021-03-09 |
| 10221910 | Fluid damper device, apparatus with damper and western-style toilet unit | Naoya Mihara | 2019-03-05 |
| 9651859 | Mask blank, transfer mask and method of manufacturing transfer mask | Masahiro Hashimoto, Atsushi Kominato, Osamu Nozawa | 2017-05-16 |
| 9389501 | Photomask blank, method of manufacturing the same, photomask, and method of manufacturing the same | Masahiro Hashimoto, Toshiyuki Suzuki | 2016-07-12 |
| 9372393 | Mask blank, transfer mask, method of manufacturing a transfer mask, and method of manufacturing a semiconductor device | Atsushi Kominato, Osamu Nozawa, Masahiro Hashimoto | 2016-06-21 |
| 9195133 | Mask blank, transfer mask and method of manufacturing transfer mask | Masahiro Hashimoto, Atsushi Kominato, Osamu Nozawa | 2015-11-24 |
| 9075319 | Mask blank and transfer mask | Masahiro Hashimoto, Yasushi Okubo, Osamu Nozawa | 2015-07-07 |
| 9075314 | Photomask blank, photomask, and method for manufacturing photomask blank | Hiroaki Shishido, Atsushi Kominato, Masahiro Hashimoto, Morio Hosoya | 2015-07-07 |
| 9075320 | Mask blank, transfer mask, method of manufacturing a transfer mask, and method of manufacturing a semiconductor device | Atsushi Kominato, Masahiro Hashimoto | 2015-07-07 |
| 9017902 | Mask blank, transfer mask, and method of manufacturing a transfer mask | Osamu Nozawa, Masahiro Hashimoto, Atsushi Kominato | 2015-04-28 |
| 9005851 | Phase shift mask blank and phase shift mask | Hiroaki Shishido, Atsushi Kominato, Masahiro Hashimoto | 2015-04-14 |
| 8865378 | Photomask blank, photomask, and methods of manufacturing the same | Atsushi Kominato, Masahiro Hashimoto, Hiroaki Shishido | 2014-10-21 |
| 8822103 | Mask blank, transfer mask, method of manufacturing a transfer mask, and method of manufacturing a semiconductor device | Atsushi Kominato, Osamu Nozawa, Masahiro Hashimoto | 2014-09-02 |
| 8697315 | Photomask blank and production method thereof, and photomask production method, and semiconductor device production method | Takeyuki Yamada, Atsushi Kominato, Masahiro Hashimoto, Yasushi Okubo | 2014-04-15 |
| 8663876 | Photomask blank, method of manufacturing the same, photomask, and method of manufacturing the same | Masahiro Hashimoto, Toshiyuki Suzuki | 2014-03-04 |
| 8637213 | Mask blank and transfer mask | Masahiro Hashimoto, Atsushi Kominato, Osamu Nozawa | 2014-01-28 |
| 8574793 | Mask blank, transfer mask, method of manufacturing a transfer mask, and method of manufacturing a semiconductor device | Atsushi Kominato, Masahiro Hashimoto | 2013-11-05 |
| 8512916 | Photomask blank, photomask, and method for manufacturing photomask blank | Hiroaki Shishido, Atsushi Kominato, Masahiro Hashimoto, Morio Hosoya | 2013-08-20 |
| 8507155 | Photomask blank, photomask, and method for manufacturing photomask blank | Hiroaki Shishido, Atsushi Kominato, Masahiro Hashimoto | 2013-08-13 |