Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12027353 | Substrate processing method and apparatus | Hiroyuki Toshima, Hiroyuki Iwashita, Tatsuo Hirasawa | 2024-07-02 |
| 12014911 | Sputtering apparatus | Tatsuo Hirasawa, Hiroyuki Toshima, Hiroyuki Iwashita | 2024-06-18 |
| 11851750 | Apparatus and method for performing sputtering process | Masato SHINADA, Einstein Noel Abarra, Hiroyuki Toshima | 2023-12-26 |
| 11776817 | Pattern forming method | — | 2023-10-03 |
| 11742190 | Sputtering apparatus and film forming method | Einstein Noel Abarra, Hiroyuki Toshima, Hiroyuki Iwashita, Tatsuo Hirasawa, Masato SHINADA | 2023-08-29 |
| 11715671 | Film forming system, magnetization characteristic measuring device, and film forming method | Hiroaki Chihaya, Einstein Noel Abarra | 2023-08-01 |
| 11705315 | Sputtering apparatus and sputtering method | Hiroyuki Toshima | 2023-07-18 |
| 11479848 | Film forming apparatus and method | Hiroyuki Toshima, Hiroyuki Iwashita, Tatsuo Hirasawa | 2022-10-25 |
| 9761601 | Semiconductor memory device and method for manufacturing same | — | 2017-09-12 |