Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12315707 | Mounting table structure, substrate processing apparatus, and method of controlling substrate processing apparatus | Motoi YAMAGATA, Hiroshi Sone | 2025-05-27 |
| 12261078 | Processing method and processing apparatus | Takuya UMISE, Tetsuya Miyashita | 2025-03-25 |
| 12002667 | Sputtering apparatus and method of controlling sputtering apparatus | Tetsuya Miyashita, Einstein Noel Abarra | 2024-06-04 |
| 11939665 | Film thickness measuring apparatus and film thickness measuring method, and film forming system and film forming method | Tamaki Takeyama, Kazunaga ONO, Naoyuki Suzuki, Hiroaki Chihaya, Einstein Noel Abarra | 2024-03-26 |
| 11851750 | Apparatus and method for performing sputtering process | Einstein Noel Abarra, Hiroyuki Toshima, Shota ISHIBASHI | 2023-12-26 |
| 11823879 | Film formation apparatus and film formation method | Tetsuya Miyashita, Naoki Watanabe | 2023-11-21 |
| 11742190 | Sputtering apparatus and film forming method | Einstein Noel Abarra, Hiroyuki Toshima, Shota ISHIBASHI, Hiroyuki Iwashita, Tatsuo Hirasawa | 2023-08-29 |
| 11664207 | Film-forming apparatus, film-forming system, and film-forming method | Hiroyuki Toshima | 2023-05-30 |
| 11581171 | Cathode unit and film forming apparatus | Einstein Noel Abarra | 2023-02-14 |
| 11542592 | Film forming system and method for forming film on substrate | Naoki Watanabe, Tetsuya Miyashita, Hiroaki Chihaya | 2023-01-03 |
| 11512388 | Film forming apparatus and film forming method | Hiroyuki Toshima | 2022-11-29 |
| 11495446 | Film formation device and film formation method | Hiroyuki Toshima, Einstein Noel Abarra | 2022-11-08 |
| 9368331 | Sputtering apparatus | Keisuke Ueda | 2016-06-14 |