Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12392026 | Method and device for substrate processing | Hiroaki Chihaya, Motoi YAMAGATA, Manabu Nakagawasai, Shinji Orimoto | 2025-08-19 |
| 11939665 | Film thickness measuring apparatus and film thickness measuring method, and film forming system and film forming method | Masato SHINADA, Kazunaga ONO, Naoyuki Suzuki, Hiroaki Chihaya, Einstein Noel Abarra | 2024-03-26 |
| 11081322 | Film forming apparatus, cleaning method for film forming apparatus and recording medium | Naotaka Noro, Toshio Hasegawa, Shinya Iwashita, Katsuhito Hirose | 2021-08-03 |
| 7582571 | Substrate processing method and recording medium | Munehisa Futamura | 2009-09-01 |