Issued Patents All Time
Showing 25 most recent of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400963 | Conductive superlattice structures and methods of forming the same | Hiroaki Niimi, Gerrit J. Leusink, Hiroki Maehara, Naoki Watanabe | 2025-08-26 |
| 12235045 | Magnetic annealing equipment and method | Ian Colgan, Ioan Domsa, George Eyres, Bartlomiej Burkowicz, Barry Clarke +1 more | 2025-02-25 |
| 12170217 | Substrate processing apparatus and abnormality detection method | Hiroaki Chihaya, Yasuhiko Kojima, Tetsuya Miyashita | 2024-12-17 |
| 12002667 | Sputtering apparatus and method of controlling sputtering apparatus | Masato SHINADA, Tetsuya Miyashita | 2024-06-04 |
| 11939665 | Film thickness measuring apparatus and film thickness measuring method, and film forming system and film forming method | Masato SHINADA, Tamaki Takeyama, Kazunaga ONO, Naoyuki Suzuki, Hiroaki Chihaya | 2024-03-26 |
| 11851750 | Apparatus and method for performing sputtering process | Masato SHINADA, Hiroyuki Toshima, Shota ISHIBASHI | 2023-12-26 |
| 11823880 | Target structure and film forming apparatus | — | 2023-11-21 |
| 11742190 | Sputtering apparatus and film forming method | Hiroyuki Toshima, Shota ISHIBASHI, Hiroyuki Iwashita, Tatsuo Hirasawa, Masato SHINADA | 2023-08-29 |
| 11715671 | Film forming system, magnetization characteristic measuring device, and film forming method | Hiroaki Chihaya, Shota ISHIBASHI | 2023-08-01 |
| 11581171 | Cathode unit and film forming apparatus | Masato SHINADA | 2023-02-14 |
| 11495446 | Film formation device and film formation method | Masato SHINADA, Hiroyuki Toshima | 2022-11-08 |
| 11220741 | Film forming apparatus and film forming method | — | 2022-01-11 |
| 10062545 | Apparatus and method for processing substrate using ion beam | Yasushi Kamiya, Yuta Konno | 2018-08-28 |
| 9911526 | Magnet unit and magnetron sputtering apparatus | Tetsuya Endo | 2018-03-06 |
| 9422623 | Ion beam generator and ion beam plasma processing apparatus | Yasushi Kamiya, Yuta Konno | 2016-08-23 |
| 9355878 | Substrate processing apparatus | Yukihito Tashiro | 2016-05-31 |
| 9312102 | Apparatus and method for processing substrate using ion beam | Yasushi Kamiya, Yuta Konno | 2016-04-12 |
| 9058962 | Magnet unit and magnetron sputtering apparatus | Tetsuya Endo | 2015-06-16 |
| 8999121 | Sputtering apparatus | Kyosuke Sugi, Tetsuya Endo | 2015-04-07 |
| 8776542 | Cooling system | Tetsuya Endo | 2014-07-15 |
| 8778150 | Magnetron sputtering cathode, magnetron sputtering apparatus, and method of manufacturing magnetic device | Tetsuya Endo | 2014-07-15 |
| 8673124 | Magnet unit and magnetron sputtering apparatus | Tetsuya Endo | 2014-03-18 |
| 8536539 | Ion beam generator, and substrate processing apparatus and production method of electronic device using the ion beam generator | Hirohisa Hirayanagi, Ayumu Miyoshi | 2013-09-17 |
| 8507113 | Magnetic sensor stack body, method of forming the same, film formation control program, and recording medium | Tetsuya Endo | 2013-08-13 |
| 8378576 | Ion beam generator | Yasushi Miura, Eiji FUJIYAMA, Naoyuki Suzuki, Yasuyuki Taneda, Yasushi Kamiya | 2013-02-19 |