Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8900426 | Double-layer shutter sputtering apparatus | Shuji Nomura, Hiroshi Miki | 2014-12-02 |
| 8601978 | Substrate processing apparatus, and magnetic recording medium manufacturing method | Kazuto Yamanaka, Masahiro Shibamoto, Satoshi Hitomi, David Djulianto Djayaprawira | 2013-12-10 |
| 8536539 | Ion beam generator, and substrate processing apparatus and production method of electronic device using the ion beam generator | Hirohisa Hirayanagi, Einstein Noel Abarra | 2013-09-17 |
| 8281740 | Substrate processing apparatus, and magnetic recording medium manufacturing method | Kazuto Yamanaka, Masahiro Shibamoto, Satoshi Hitomi, David Djulianto Djayaprawira | 2012-10-09 |
| 7850827 | Double-layer shutter control method of multi-sputtering system | Shuji Nomura, Hiroshi Miki | 2010-12-14 |
| 6641703 | Magnetic multi-layer film manufacturing apparatus | Shuji Nomura, Koji Tsunekawa | 2003-11-04 |