Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11600295 | Vacuum process apparatus and vacuum process method | Hiroshi Yakushiji | 2023-03-07 |
| 11289305 | Deposition method and deposition apparatus | Hiroshi Yakushiji, Yuzuru Miura | 2022-03-29 |
| 10971332 | Plasma processing apparatus and plasma processing method | Hiroshi Yakushiji, Yuto Watanabe | 2021-04-06 |
| 10917960 | Deposition apparatus | Masahiro Atsumi, Hidekazu Nishimura, Hiroshi Yakushiji | 2021-02-09 |
| 10731245 | Vacuum arc deposition apparatus and deposition method | Hiroshi Yakushiji, Yuto Watanabe, Yuzuru Miura | 2020-08-04 |
| 10626494 | Plasma CVD apparatus and vacuum treatment apparatus | Hiroshi Yakushiji, Kazuto Yamanaka, Shogo Hiramatsu, Susumu KARINO | 2020-04-21 |
| 10011899 | Deposition apparatus | Teruaki Ono | 2018-07-03 |
| 8956515 | Multilayer-film sputtering apparatus and method of forming multilayer film | — | 2015-02-17 |
| 8715417 | Film forming apparatus | Shinji Furukawa | 2014-05-06 |
| 8601978 | Substrate processing apparatus, and magnetic recording medium manufacturing method | Kazuto Yamanaka, Ayumu Miyoshi, Satoshi Hitomi, David Djulianto Djayaprawira | 2013-12-10 |
| 8377210 | Film forming apparatus | Shinji Furukawa | 2013-02-19 |
| 8281740 | Substrate processing apparatus, and magnetic recording medium manufacturing method | Kazuto Yamanaka, Ayumu Miyoshi, Satoshi Hitomi, David Djulianto Djayaprawira | 2012-10-09 |
| 8053747 | Substrate processing apparatus and cleaning method of the same | Einstein Noel Abarra | 2011-11-08 |
| 7935187 | Film forming apparatus | Shinji Furukawa | 2011-05-03 |
| 7625450 | Film forming apparatus | Shinji Furukawa | 2009-12-01 |
| 7517438 | Magnetic recording disk, magnetic recording disk manufacturing method and magnetic recording disk manufacturing system | Sinji Furukawa, Tetsuya Endoh, Miho Sakai, Naoki Watanabe | 2009-04-14 |
| 7115191 | Magnetic recording disk, magnetic recording disk manufacturing method and magnetic recording disk manufacturing system | Sinji Furukawa, Tetsuya Endoh, Miho Sakai, Naoki Watanabe | 2006-10-03 |
| 6740209 | Multilayer film deposition apparatus, and method and apparatus for manufacturing perpendicular-magnetic-recording media | Shinji Furukawa, Tetsuya Endoh, Miho Sakai, Naoki Watanabe | 2004-05-25 |