Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11035034 | Film formation method, vacuum processing apparatus, method of manufacturing semiconductor light emitting element, semiconductor light emitting element, method of manufacturing semiconductor electronic element, semiconductor electronic element, and illuminating apparatus | Yoshiaki DAIGO, Takuya Seino, Yoshitaka Ohtsuka, Hiroyuki Makita, Sotaro Ishibashi | 2021-06-15 |
| 10626494 | Plasma CVD apparatus and vacuum treatment apparatus | Hiroshi Yakushiji, Masahiro Shibamoto, Shogo Hiramatsu, Susumu KARINO | 2020-04-21 |
| 8658048 | Method of manufacturing magnetic recording medium | Shogo Hiramatsu | 2014-02-25 |
| 8601978 | Substrate processing apparatus, and magnetic recording medium manufacturing method | Masahiro Shibamoto, Ayumu Miyoshi, Satoshi Hitomi, David Djulianto Djayaprawira | 2013-12-10 |
| 8317971 | Plasma processing apparatus and method of manufacturing magnetic recording medium | Akio Sato | 2012-11-27 |
| 8281740 | Substrate processing apparatus, and magnetic recording medium manufacturing method | Masahiro Shibamoto, Ayumu Miyoshi, Satoshi Hitomi, David Djulianto Djayaprawira | 2012-10-09 |