Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12338526 | Deposition apparatus | — | 2025-06-24 |
| 11821067 | Deposition apparatus | — | 2023-11-21 |
| 10917960 | Deposition apparatus | Hidekazu Nishimura, Masahiro Shibamoto, Hiroshi Yakushiji | 2021-02-09 |
| 10676813 | Deposition apparatus | — | 2020-06-09 |
| 10501210 | Aerospace vehicle system | Yoshikatsu Kuroda, Naohiko Abe, Masahiro Kato | 2019-12-10 |
| 8770906 | Substrate support apparatus and substrate transport apparatus having shock absorption | Masaaki Ishida | 2014-07-08 |
| 5407331 | Motor-driven pump | — | 1995-04-18 |