Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8536539 | Ion beam generator, and substrate processing apparatus and production method of electronic device using the ion beam generator | Ayumu Miyoshi, Einstein Noel Abarra | 2013-09-17 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8536539 | Ion beam generator, and substrate processing apparatus and production method of electronic device using the ion beam generator | Ayumu Miyoshi, Einstein Noel Abarra | 2013-09-17 |