Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10062545 | Apparatus and method for processing substrate using ion beam | Einstein Noel Abarra, Yuta Konno | 2018-08-28 |
| 9966092 | Ion beam etching method and ion beam etching apparatus | Hiroshi Akasaka, Kiyotaka Sakamoto | 2018-05-08 |
| 9852879 | Ion beam processing method and ion beam processing apparatus | Hiroshi Akasaka, Yuta Konno | 2017-12-26 |
| 9564360 | Substrate processing method and method of manufacturing semiconductor device | Hiroshi Akasaka, Masayoshi Ikeda, Kazuhiro Kimura, Tomohiko Toyosato | 2017-02-07 |
| 9422623 | Ion beam generator and ion beam plasma processing apparatus | Einstein Noel Abarra, Yuta Konno | 2016-08-23 |
| 9312102 | Apparatus and method for processing substrate using ion beam | Einstein Noel Abarra, Yuta Konno | 2016-04-12 |
| 9190287 | Method of fabricating fin FET and method of fabricating device | Takashi Nakagawa, Masayoshi Ikeda, Yukito Nakagawa, Yoshimitsu Kodaira | 2015-11-17 |
| 8378576 | Ion beam generator | Einstein Noel Abarra, Yasushi Miura, Eiji FUJIYAMA, Naoyuki Suzuki, Yasuyuki Taneda | 2013-02-19 |
| 7704556 | Silicon nitride film forming method | Hitoshi Morisaki, Shuji Nomura, Masahiro Totuka, Tomoki Oku, Ryo Hattori | 2010-04-27 |