Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10685815 | Plasma processing apparatus and device manufacturing method | Ryo Matsuhashi, Yoshimitsu Kodaira, Atsushi Sekiguchi, Naoko Matsui | 2020-06-16 |
| 9966092 | Ion beam etching method and ion beam etching apparatus | Yasushi Kamiya, Kiyotaka Sakamoto | 2018-05-08 |
| 9852879 | Ion beam processing method and ion beam processing apparatus | Yasushi Kamiya, Yuta Konno | 2017-12-26 |
| 9564360 | Substrate processing method and method of manufacturing semiconductor device | Masayoshi Ikeda, Kazuhiro Kimura, Yasushi Kamiya, Tomohiko Toyosato | 2017-02-07 |
| 8465990 | Manufacturing method of magneto-resistance effect element | Naoko Matsui, Eiji Ozaki | 2013-06-18 |