Issued Patents All Time
Showing 25 most recent of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10226978 | Vehicle height adjustment device | Takahiro Kasuga, Takahiro Koresawa | 2019-03-12 |
| 10214069 | Vehicle height adjustment device | — | 2019-02-26 |
| 10214070 | Vehicle height adjustment device | Takahiro Kasuga, Takahiro Koresawa | 2019-02-26 |
| 10157961 | Method of manufacturing magnetoresistive element | Marie Hayashi, Kiyotaka Sakamoto | 2018-12-18 |
| 10046615 | Vehicle height adjustment device | — | 2018-08-14 |
| 9844126 | Plasma treatment apparatus | Kiyotaka Sakamoto, Akihiro Sawada, Yasumi Sago, Masami Hasegawa, Motozo Kurita | 2017-12-12 |
| 9601688 | Method of manufacturing magnetoresistive element and method of processing magnetoresistive film | — | 2017-03-21 |
| 9564360 | Substrate processing method and method of manufacturing semiconductor device | Hiroshi Akasaka, Kazuhiro Kimura, Yasushi Kamiya, Tomohiko Toyosato | 2017-02-07 |
| 9190287 | Method of fabricating fin FET and method of fabricating device | Takashi Nakagawa, Yukito Nakagawa, Yasushi Kamiya, Yoshimitsu Kodaira | 2015-11-17 |
| 8970213 | Method for manufacturing magnetoresistance effect element | Tomohiko Toyosato, Mihoko Nakamura, Kazuhiro Kimura | 2015-03-03 |
| 8778151 | Plasma processing apparatus | Yo Tanaka, Tsutomu Hiroishi | 2014-07-15 |
| 8231767 | Magnetic field generating apparatus and plasma processing apparatus | Kazuyuki Iori, Yasumi Sago | 2012-07-31 |
| 8007633 | Surface processing apparatus | Akihiro Egami, Yasumi Sago, Yukito Nakagawa | 2011-08-30 |
| 7976716 | Semiconductor device manufacturing method | Yasumi Sago, Kazuaki Kaneko, Takuji Okada | 2011-07-12 |
| RE42175 | Electrostatic chucking stage and substrate processing apparatus | Yasumi Sago, Kazuaki Kaneko, Takuji Okada, Toshihiro Tachikawa, Tadashi Inokuchi +1 more | 2011-03-01 |
| 7767056 | High-frequency plasma processing apparatus | Yasumi Sago, Nobuaki Tsuchiya, Hisaaki Sato | 2010-08-03 |
| 7615133 | Electrostatic chuck module and cooling system | Noriaki Tateno, Jun Miyaji, Yasumi Sago, Kazuaki Kaneko, Tomio Takamura +3 more | 2009-11-10 |
| 7513063 | Substrate processing apparatus | Yasumi Sago, Kazuaki Kaneko, Takuji Okada | 2009-04-07 |
| 7323081 | High-frequency plasma processing apparatus | Yasumi Sago, Nobuaki Tsuchiya, Hisaaki Sato | 2008-01-29 |
| 7220319 | Electrostatic chucking stage and substrate processing apparatus | Yasumi Sago, Kazuaki Kaneko, Takuji Okada, Toshihiro Tachikawa, Tadashi Inokuchi +1 more | 2007-05-22 |
| 7175737 | Electrostatic chucking stage and substrate processing apparatus | Yasumi Sago, Kazuaki Kaneko, Takuji Okada | 2007-02-13 |
| 7011744 | Brine supply unit | Tomio Takamura, Tadashi Hirayama, Yoshiyuki Ikemura, Masahiko Tamaru, Yasumi Sago +3 more | 2006-03-14 |
| 6774570 | RF plasma processing method and RF plasma processing system | Nobuaki Tsuchiya, Yasumi Sago | 2004-08-10 |
| 6532796 | Method of substrate temperature control and method of assessing substrate temperature controllability | — | 2003-03-18 |
| 6426299 | Method and apparatus for manufacturing semiconductor device | — | 2002-07-30 |