Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10685815 | Plasma processing apparatus and device manufacturing method | Ryo Matsuhashi, Hiroshi Akasaka, Atsushi Sekiguchi, Naoko Matsui | 2020-06-16 |
| 10546720 | Ion beam processing device | Isao Takeuchi, Mihoko Nakamura | 2020-01-28 |
| 10388491 | Ion beam etching method of magnetic film and ion beam etching apparatus | Tomohiko Toyosato | 2019-08-20 |
| 10026591 | Method for manufacturing semiconductor device, ion beam etching device, and control device | Yukito Nakagawa, Motozo Kurita | 2018-07-17 |
| 9984854 | Ion beam processing method and ion beam processing apparatus | Isao Takeuchi, Mihoko Nakamura | 2018-05-29 |
| 9773973 | Process for producing magnetoresistive effect element and device producing method | Isao Takeuchi, Mihoko Nakamura | 2017-09-26 |
| 9734989 | Method for manufacturing semiconductor device, ion beam etching device, and control device | Yukito Nakagawa, Motozo Kurita | 2017-08-15 |
| 9640754 | Process for producing magnetoresistive effect element | Yukito Nakagawa, Motozo Kurita, Takashi Nakagawa | 2017-05-02 |
| 9190287 | Method of fabricating fin FET and method of fabricating device | Takashi Nakagawa, Masayoshi Ikeda, Yukito Nakagawa, Yasushi Kamiya | 2015-11-17 |
| 8540852 | Method and apparatus for manufacturing magnetoresistive devices | Naoki Watanabe, David Djulianto Djayaprawira, Hiroki Maehara | 2013-09-24 |
| 7981805 | Method for manufacturing resistance change element | Tomoaki Osada, Sanjay Shinde | 2011-07-19 |
| RE40951 | Dry etching method for magnetic material | Taichi Hiromi | 2009-11-10 |
| 7060194 | Dry etching method for magnetic material | Taichi Hiromi | 2006-06-13 |