Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10062553 | Sputtering apparatus and processing apparatus | Hidetoshi Shimokawa, Atsuyuki Ichikawa | 2018-08-28 |
| 8470128 | Tray, tray support member, and vacuum processing apparatus | Tadaaki Murakami | 2013-06-25 |
| RE40951 | Dry etching method for magnetic material | Yoshimitsu Kodaira | 2009-11-10 |
| 7060194 | Dry etching method for magnetic material | Yoshimitsu Kodaira | 2006-06-13 |