Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8587181 | Piezo-electric actuator drive circuit and piezo-electric actuator device furnished with same | — | 2013-11-19 |
| 8470128 | Tray, tray support member, and vacuum processing apparatus | Taichi Hiromi | 2013-06-25 |