Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12308254 | Load lock device | Jun Miura, Naoya Fukuda, Shuji Kumagai, Shinji Takagi, Tetsuro TODA +3 more | 2025-05-20 |
| 12211735 | Load lock device | Jun Miura, Naoya Fukuda, Shinji Takagi | 2025-01-28 |
| 10062553 | Sputtering apparatus and processing apparatus | Taichi Hiromi, Atsuyuki Ichikawa | 2018-08-28 |