Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10026591 | Method for manufacturing semiconductor device, ion beam etching device, and control device | Yoshimitsu Kodaira, Motozo Kurita | 2018-07-17 |
| 9734989 | Method for manufacturing semiconductor device, ion beam etching device, and control device | Yoshimitsu Kodaira, Motozo Kurita | 2017-08-15 |
| 9721747 | Grid, method of manufacturing the same, and ion beam processing apparatus | Masashi Tsujiyama, Yasushi Yasumatsu | 2017-08-01 |
| 9685299 | Substrate processing apparatus, etching method of metal film, and manufacturing method of magnetoresistive effect element | — | 2017-06-20 |
| 9640754 | Process for producing magnetoresistive effect element | Yoshimitsu Kodaira, Motozo Kurita, Takashi Nakagawa | 2017-05-02 |
| 9190287 | Method of fabricating fin FET and method of fabricating device | Takashi Nakagawa, Masayoshi Ikeda, Yasushi Kamiya, Yoshimitsu Kodaira | 2015-11-17 |
| 8475672 | Plasma processing device, plasma processing method and method of manufacturing element including substrate to be processed | Kazuyuki Iori | 2013-07-02 |
| 8007633 | Surface processing apparatus | Akihiro Egami, Masayoshi Ikeda, Yasumi Sago | 2011-08-30 |
| 6664496 | Plasma processing system | Yoshimi Watabe, Shinya Hasegawa, Yoichiro Numasawa | 2003-12-16 |
| 6462482 | Plasma processing system for sputter deposition applications | Sunil Wickramanayaka | 2002-10-08 |
| 6376796 | Plasma processing system | Noriyoshi Sato, Satoru Iizuka, Tsukasa Yoneyama, Hiroyasu Sato, Unryu Ogawa +2 more | 2002-04-23 |
| 6339997 | Plasma processing apparatus | Ken'ichi Takagi | 2002-01-22 |
| 6043608 | Plasma processing apparatus | Seiji Samukawa, Hisaaki Sato, Tsutomu Tsukada, Kibatsu Shinohara, Yasuo Niimura | 2000-03-28 |
| 5961776 | Surface processing apparatus | Hisaaki Sato, Ken-ichi Takagi, Tomoaki Koide, Tsutomu Tsukada | 1999-10-05 |
| 5936352 | Plasma processing apparatus for producing plasma at low electron temperatures | Seiji Samukawa, Tsutomu Tsukada, Kibatsu Shinohara, Hirofumi Matsumoto, Hiroyuki Ueyama | 1999-08-10 |
| 5900699 | Plasma generator with a shield interposing the antenna | Seiji Samukawa, Tsutomu Tsukada, Kibatsu Shinohara, Hiroyuki Ueyama | 1999-05-04 |
| 5565738 | Plasma processing apparatus which uses a uniquely shaped antenna to reduce the overall size of the apparatus with respect to the plasma chamber | Seiji Samukawa, Kibatsu Shinohara, Hirobumi Matsumoto, Tsutomu Tsukada | 1996-10-15 |
| 4919783 | Apparatus for processing an object by gas plasma with a reduced damage | Tatsuo Asamaki, Hideo Mito, Atsushi Sekiguchi | 1990-04-24 |