Issued Patents All Time
Showing 1–25 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10056671 | Waveguide type power combining/dividing unit | Shuichi Aizawa, Yutaka Arisumi | 2018-08-21 |
| 9419323 | Power combiner/divider of a radial line type impedance matched between a center connector and peripheral outer connectors | Yutaka Arizumi | 2016-08-16 |
| 8840844 | Plasma generating apparatus | Hideki Fujita | 2014-09-23 |
| 8779873 | Ferrite phase shifter and automatic matching apparatus | Shigetsugu Tsuruoka | 2014-07-15 |
| 8427254 | Ferrite phase shifter and automatic matching apparatus | Shigetsugu Tsuruoka | 2013-04-23 |
| 7545226 | Magnetron oscillator | — | 2009-06-09 |
| 7395779 | Plasma processing apparatus | Nobuo Ishii, Yasuyoshi Yasaka | 2008-07-08 |
| 7392760 | Microwave-excited plasma processing apparatus | Yoji Taguchi, Maiko Yoshida, Kohta Kusaba, Munekazu Matsuo, Kazuhiro Watanabe | 2008-07-01 |
| 7296533 | Radial antenna and plasma device using it | Nobuo Ishii | 2007-11-20 |
| 7186314 | Plasma processor and plasma processing method | Nobuo Ishii | 2007-03-06 |
| 7102110 | Magnetron oscillating apparatus | — | 2006-09-05 |
| 7071442 | Plasma processing apparatus | Nobuo Ishii | 2006-07-04 |
| 6910440 | Apparatus for plasma processing | Nobuo Ishii, Yasuyoshi Yasaka | 2005-06-28 |
| 6847003 | Plasma processing apparatus | Nobuo Ishii | 2005-01-25 |
| 6707253 | Matching circuit and plasma processing apparatus | Kenji Sumida, Tomohiro Okumura, Yukihiro Maegawa, Ichiro Nakayama, Minoru Kanda +1 more | 2004-03-16 |
| 6657151 | Plasma processing device | Nobuo Ishii | 2003-12-02 |
| 6043608 | Plasma processing apparatus | Seiji Samukawa, Yukito Nakagawa, Hisaaki Sato, Tsutomu Tsukada, Yasuo Niimura | 2000-03-28 |
| 5936352 | Plasma processing apparatus for producing plasma at low electron temperatures | Seiji Samukawa, Tsutomu Tsukada, Yukito Nakagawa, Hirofumi Matsumoto, Hiroyuki Ueyama | 1999-08-10 |
| 5929570 | Micro-wave plasma device with a metal cooling wire wrapped around the insulating tube | Satoru Ishida, Hiroyuki Ueyama | 1999-07-27 |
| 5900699 | Plasma generator with a shield interposing the antenna | Seiji Samukawa, Tsutomu Tsukada, Yukito Nakagawa, Hiroyuki Ueyama | 1999-05-04 |
| 5874706 | Microwave plasma processing apparatus using a hybrid microwave having two different modes of oscillation or branched microwaves forming a concentric electric field | Nobuo Ishii | 1999-02-23 |
| 5637961 | Concentric rings with different RF energies applied thereto | Nobuo Ishii | 1997-06-10 |
| 5565738 | Plasma processing apparatus which uses a uniquely shaped antenna to reduce the overall size of the apparatus with respect to the plasma chamber | Seiji Samukawa, Hirobumi Matsumoto, Tsutomu Tsukada, Yukito Nakagawa | 1996-10-15 |
| 5542833 | Apparatus for continuously vulcanizing rubber product | Shozo Watanabe | 1996-08-06 |
| 5448173 | Triple-probe plasma measuring apparatus for correcting space potential errors | Tsuku Umezawa | 1995-09-05 |