Issued Patents All Time
Showing 25 most recent of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12129548 | Method of forming structures using a neutral beam | Tomohiro Kubota, Mitsuya Utsuno, Toshihisa Nozawa, Hua Chen | 2024-10-29 |
| 11643724 | Method of forming structures using a neutral beam | Tomohiro Kubota, Mitsuya Utsuno, Toshihisa Nozawa, Hua Chen | 2023-05-09 |
| 11488833 | Method of manufacturing semiconductor device | Kenta Sugawara, Daisuke Ohori | 2022-11-01 |
| 9620338 | System, method, and program for predicting processing shape by plasma process | Kohei Ono, Takuya Iwasaki | 2017-04-11 |
| 9412567 | Plasma monitoring method and plasma monitoring system | Tomohiko Tatsumi | 2016-08-09 |
| 9096937 | Method for etching film having transition metal | Xun Gu | 2015-08-04 |
| 9005461 | Plasma monitoring method and plasma monitoring system | Tomohiko Tatsumi | 2015-04-14 |
| 8828886 | Low dielectric constant insulating film and method for forming the same | Shigeo Yasuhara, Shingo Kadomura, Tsutomu Shimayama, Hisashi Yano, Kunitoshi Tajima +2 more | 2014-09-09 |
| 8427168 | Plasma monitoring method | Tomohiko Tatsumi | 2013-04-23 |
| 7923268 | Method of measuring resistivity of sidewall of contact hole | Youichi Yatagai, Shinji Kawada | 2011-04-12 |
| 7808026 | Dry etching method and production method of magnetic memory device | Toshiaki Shiraiwa, Tetsuya Tatsumi | 2010-10-05 |
| 7732783 | Ultraviolet light monitoring system | Jun Hashimoto, Shinji Kawada, Ikuo Kurachi | 2010-06-08 |
| 7520956 | On-wafer monitoring system | Tadashi Shinmura, Mitsuru Okigawa | 2009-04-21 |
| 7473646 | Dry etching method and production method of magnetic memory device | Toshiaki Shiraiwa, Tetsuya Tatsumi | 2009-01-06 |
| 7314574 | Etching method and apparatus | Katsunori Ichiki, Kazuo Yamauchi, Hirokuni Hiyama | 2008-01-01 |
| 7184134 | Real-time monitoring apparatus for plasma process | — | 2007-02-27 |
| 7144520 | Etching method and apparatus | Katsunori Ichiki, Kazuo Yamauchi, Hirokuni Hiyama | 2006-12-05 |
| 7078862 | Beam source and beam processing apparatus | Akira Fukuda, Akio Shibata, Hirokuni Hiyama, Katsunori Ichiki, Kazuo Yamauchi | 2006-07-18 |
| 7034285 | Beam source and beam processing apparatus | Katsunori Ichiki, Akio Shibata, Akira Fukuda, Hirokuni Hiyama, Kazuo Yamauchi | 2006-04-25 |
| 7000565 | Plasma surface treatment system and plasma surface treatment method | Seiichi Fukuda | 2006-02-21 |
| 6909086 | Neutral particle beam processing apparatus | Katsunori Ichiki, Kazuo Yamauchi, Hirokuni Hiyama | 2005-06-21 |
| 6909087 | Method of processing a surface of a workpiece | Katsunori Ichiki, Kazuo Yamauchi, Hirokuni Hiyama | 2005-06-21 |
| 6861642 | Neutral particle beam processing apparatus | Katsunori Ichiki, Kazuo Yamauchi, Hirokuni Hiyama | 2005-03-01 |
| 6861643 | Neutral particle beam processing apparatus | Katsunori Ichiki, Kazuo Yamauchi, Hirokuni Hiyama | 2005-03-01 |
| 6858838 | Neutral particle beam processing apparatus | Katsunori Ichiki, Kazuo Yamauchi, Hirokuni Hiyama | 2005-02-22 |