Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12129548 | Method of forming structures using a neutral beam | Tomohiro Kubota, Toshihisa Nozawa, Seiji Samukawa, Hua Chen | 2024-10-29 |
| 12125700 | Method of forming high aspect ratio features | Hirotsugu Sugiura, Yoshio Susa | 2024-10-22 |
| 11643724 | Method of forming structures using a neutral beam | Tomohiro Kubota, Toshihisa Nozawa, Seiji Samukawa, Hua Chen | 2023-05-09 |
| 11646197 | Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition | Timothee Blanquart, Yoshio Susa, Atsuki Fukazawa, Toshio Nakanishi | 2023-05-09 |
| 11626316 | Method of depositing carbon-containing material on a surface of a substrate, structure formed using the method, and system for forming the structure | Yan Zhang, Yoshio Susa, Atsuki Fukazawa | 2023-04-11 |
| 10811256 | Method for etching a carbon-containing feature | Tomohiro Kubota, Dai Ishikawa | 2020-10-20 |
| 10755922 | Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition | Timothee Blanquart, Yoshio Susa, Atsuki Fukazawa, Toshio Nakanishi | 2020-08-25 |