Issued Patents All Time
Showing 25 most recent of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12428728 | Topology-selective deposition method and structure formed using same | — | 2025-09-30 |
| 12424490 | Halogenation-based gapfill method and system | René Henricus Jozef Vervuurt, Jihee Jeon | 2025-09-23 |
| 12406881 | Methods and systems for filling a gap | Elina Färm, Shinya Iwashita, Charles Dezelah, Jan Willem Maes, René Henricus Jozef Vervuurt +5 more | 2025-09-02 |
| 12381087 | Methods for filling a gap and related systems and devices | — | 2025-08-05 |
| 12341003 | Method and system for forming material within a gap | — | 2025-06-24 |
| 12293942 | Methods for depositing gap filling fluids and related systems and devices | — | 2025-05-06 |
| 12211742 | Methods for depositing gap filling fluid | Viljami Pore, René Henricus Jozef Vervuurt, Jihee Jeon | 2025-01-28 |
| 12129546 | Methods and apparatuses for flowable gap-fill | Shinya Yoshimoto, Takahiro Onuma, Makoto Igarashi, Yukihiro Mori, Hideaki Fukuda +1 more | 2024-10-29 |
| 12112940 | Method of forming topology-controlled amorphous carbon polymer film | — | 2024-10-08 |
| 12104244 | Methods and systems for filling a gap | Charles Dezelah, René Henricus Jozef Vervuurt, Viljami Pore | 2024-10-01 |
| 11972944 | Method for depositing a gap-fill layer by plasma-assisted deposition | — | 2024-04-30 |
| 11923190 | Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition | — | 2024-03-05 |
| 11776846 | Methods for depositing gap filling fluids and related systems and devices | — | 2023-10-03 |
| 11646197 | Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition | Mitsuya Utsuno, Yoshio Susa, Atsuki Fukazawa, Toshio Nakanishi | 2023-05-09 |
| 11572620 | Methods for selectively depositing an amorphous silicon film on a substrate | — | 2023-02-07 |
| 11482412 | Method for depositing a gap-fill layer by plasma-assisted deposition | — | 2022-10-25 |
| 11289326 | Method for reforming amorphous carbon polymer film | — | 2022-03-29 |
| 11282698 | Method of forming topology-controlled amorphous carbon polymer film | — | 2022-03-22 |
| 11251035 | Method of forming a structure on a substrate | David Kurt de Roest | 2022-02-15 |
| 10867788 | Method of forming a structure on a substrate | Suvi Haukka | 2020-12-15 |
| 10784102 | Method of forming a structure on a substrate | David Kurt de Roest | 2020-09-22 |
| 10755922 | Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition | Mitsuya Utsuno, Yoshio Susa, Atsuki Fukazawa, Toshio Nakanishi | 2020-08-25 |
| 10755923 | Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition | — | 2020-08-25 |
| 10665452 | Source/drain performance through conformal solid state doping | Qi Xie, David Kurt de Roest, Jacob Woodruff, Michael Eugene Givens, Jan Willem Maes | 2020-05-26 |
| 10483099 | Method for forming thermally stable organosilicon polymer film | — | 2019-11-19 |