Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424490 | Halogenation-based gapfill method and system | Timothee Blanquart, Jihee Jeon | 2025-09-23 |
| 12406881 | Methods and systems for filling a gap | Elina Färm, Shinya Iwashita, Charles Dezelah, Jan Willem Maes, Timothee Blanquart +5 more | 2025-09-02 |
| 12347675 | Methods and systems for topography-selective depositions | Akiko Kobayashi, Nobuyoshi Kobayashi, Takayoshi Tsutsumi, Masaru Hori | 2025-07-01 |
| 12322575 | Etching processes and processing assemblies | Bablu Mukherjee, Takayoshi Tsutsumi, Nobuyoshi Kobayashi, Masaru Hori | 2025-06-03 |
| 12305281 | Method for forming metal silicon oxide and metal silicon oxynitride layers | Takashi Yoshida | 2025-05-20 |
| 12266540 | Method for fabricating layer structure having target topological profile | Eiichiro Shiba, Yoshinori Ota, Nobuyoshi Kobayashi, Akiko Kobayashi | 2025-04-01 |
| 12211742 | Methods for depositing gap filling fluid | Timothee Blanquart, Viljami Pore, Jihee Jeon | 2025-01-28 |
| 12129546 | Methods and apparatuses for flowable gap-fill | Shinya Yoshimoto, Takahiro Onuma, Makoto Igarashi, Yukihiro Mori, Hideaki Fukuda +1 more | 2024-10-29 |
| 12104244 | Methods and systems for filling a gap | Charles Dezelah, Timothee Blanquart, Viljami Pore | 2024-10-01 |
| 12094769 | Methods for filling a gap and related systems and devices | Zecheng Liu, Viljami Pore, Jia Yao | 2024-09-17 |
| 12027365 | Methods for filling a gap and related systems and devices | Zecheng Liu, Sunja Kim, Viljami Pore, Jia Yao, Ranjit Borude +4 more | 2024-07-02 |
| 11961741 | Method for fabricating layer structure having target topological profile | Eiichiro Shiba, Yoshinori Ota, Nobuyoshi Kobayashi, Akiko Kobayashi | 2024-04-16 |
| 11725280 | Method for forming metal silicon oxide and metal silicon oxynitride layers | Takashi Yoshida | 2023-08-15 |
| 10720337 | Pre-cleaning for etching of dielectric materials | Nobuyoshi Kobayashi, Takayoshi Tsutsumi, Masaru Hori | 2020-07-21 |
| 10720334 | Selective cyclic dry etching process of dielectric materials using plasma modification | Nobuyoshi Kobayashi, Takayoshi Tsutsumi, Masaru Hori | 2020-07-21 |