Issued Patents All Time
Showing 1–25 of 54 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12347675 | Methods and systems for topography-selective depositions | Akiko Kobayashi, René Henricus Jozef Vervuurt, Nobuyoshi Kobayashi, Takayoshi Tsutsumi | 2025-07-01 |
| 12322575 | Etching processes and processing assemblies | Bablu Mukherjee, René Henricus Jozef Vervuurt, Takayoshi Tsutsumi, Nobuyoshi Kobayashi | 2025-06-03 |
| 12237174 | Etching method | Kazunori Shinoda, Hirotaka Hamamura, Kenji Maeda, Kenetsu Yokogawa, Kenji Ishikawa | 2025-02-25 |
| 12027365 | Methods for filling a gap and related systems and devices | Zecheng Liu, Sunja Kim, Viljami Pore, Jia Yao, Ranjit Borude +4 more | 2024-07-02 |
| 11993849 | Carbon hard mask, film forming apparatus, and film forming method | Makoto Sekine, Hirotsugu Sugiura, Tsuyoshi Moriya, Satoshi Tanaka, Yoshinori Morisada | 2024-05-28 |
| 11673807 | Carbon nanostructured materials and methods for forming carbon nanostructured materials | Rok ZAPLOTNIK, Miran Mozetic, Gregor PRIMC, Alenka Vesel | 2023-06-13 |
| 11339242 | Method for manufacturing semiconductor substrate having group-III nitride compound layer | Keisuke Hashimoto, Yasunobu Someya, Makoto Sekine | 2022-05-24 |
| 11261091 | Carbon nanosheet and manufacturing method therefor | Hiroki Kondo, Kenji Ishikawa | 2022-03-01 |
| 10720337 | Pre-cleaning for etching of dielectric materials | René Henricus Jozef Vervuurt, Nobuyoshi Kobayashi, Takayoshi Tsutsumi | 2020-07-21 |
| 10720334 | Selective cyclic dry etching process of dielectric materials using plasma modification | René Henricus Jozef Vervuurt, Nobuyoshi Kobayashi, Takayoshi Tsutsumi | 2020-07-21 |
| 10577719 | Radical generator and molecular beam epitaxy apparatus | Hiroshi Amano, Hiroyuki Kano, Shoji Den, Koji Yamakawa | 2020-03-03 |
| 10504742 | Method of atomic layer etching using hydrogen plasma | Masaru Zaitsu, Nobuyoshi Kobayashi, Akiko Kobayashi, Takayoshi Tsutsumi | 2019-12-10 |
| 10418254 | Etching method and etching apparatus | Kazunori Shinoda, Naoyuki Kofuji, Hiroyuki Kobayashi, Nobuya Miyoshi, Kohei Kawamura +2 more | 2019-09-17 |
| 10325781 | Etching method and etching apparatus | Kazunori Shinoda, Satoshi Sakai, Masaru Izawa, Nobuya Miyoshi, Hiroyuki Kobayashi +2 more | 2019-06-18 |
| 10312054 | Radical generator and molecular beam epitaxy apparatus | Osamu Oda, Hiroyuki Kano | 2019-06-04 |
| 10283353 | Method of reforming insulating film deposited on substrate with recess pattern | Akiko Kobayashi, Masaru Zaitsu, Nobuyoshi Kobayashi | 2019-05-07 |
| 9852892 | Microwave supply apparatus, plasma processing apparatus, and plasma processing method | Hitoshi Itoh, Hirotaka Toyoda, Haruka Suzuki, Makoto Sekine | 2017-12-26 |
| 9793135 | Method of cyclic dry etching using etchant film | Masaru Zaitsu, Nobuyoshi Kobayashi, Akiko Kobayashi, Hiroki Kondo, Takayoshi Tsutsumi | 2017-10-17 |
| 9773667 | Apparatus and method for producing group III nitride semiconductor device and method for producing semiconductor wafer | Hiroki Kondo, Kenji Ishikawa, Osamu Oda | 2017-09-26 |
| 9713241 | Reactive-species supply device and surface treatment apparatus | Hiroyuki Kano, Tetsunori Kawasumi, Naofumi Yoshida, Akihiro Kawajiri, Toshimitsu Watanabe +1 more | 2017-07-18 |
| 9452481 | Reactive-species supply device and surface treatment apparatus | Hiroyuki Kano, Kazuaki Mori, Nobuyuki Nakane, Toshimitsu Watanabe, Joji Isozumi | 2016-09-27 |
| 9447518 | Radical generator and molecular beam epitaxy apparatus | Hiroshi Amano, Hiroyuki Kano, Shoji Den, Koji Yamakawa | 2016-09-20 |
| 9420697 | Method for manufacturing printed wiring board | Yoshiyuki Iwata, Hajime Sakamoto | 2016-08-16 |
| 9252000 | Microwave waveguide apparatus, plasma processing apparatus and plasma processing method | Hitoshi Itoh, Yusuke Kubota, Hirotaka Toyoda | 2016-02-02 |
| 9041937 | Interference measurement device and measurement method | Masafumi Ito, Yasuhiro Higashijima, Takayuki Ohta | 2015-05-26 |