Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12394626 | Method of forming a structure and system for same | Takashi Yoshida, Ryu Nakano, Ivan Zyulkov, Yiting Sun, Yoann Tomczak +1 more | 2025-08-19 |
| 12359312 | Method and system for forming a silicon oxycarbide layer and structure formed using same | Takashi Yoshida, Kai Okabe | 2025-07-15 |
| 12272593 | Cyclical deposition method and apparatus for filling a recess formed within a substrate surface | Viljami Pore | 2025-04-08 |
| 12176243 | Method and apparatus for filling a recess formed within a substrate surface | Viljami Pore | 2024-12-24 |
| 12107005 | Deposition method and an apparatus for depositing a silicon-containing material | Viljami Pore, Tommi Tynell, Yu Xu, Mikko Ruoho | 2024-10-01 |
| 12094769 | Methods for filling a gap and related systems and devices | Viljami Pore, Jia Yao, René Henricus Jozef Vervuurt | 2024-09-17 |
| 12027365 | Methods for filling a gap and related systems and devices | Sunja Kim, Viljami Pore, Jia Yao, Ranjit Borude, Bablu Mukherjee +4 more | 2024-07-02 |
| 11798834 | Cyclical deposition method and apparatus for filling a recess formed within a substrate surface | Viljami Pore | 2023-10-24 |
| 11735422 | Method of forming a photoresist underlayer and structure including same | Ivan Zyulkov, David Kurt de Roest, Yoann Tomczak, Michael Eugene Givens, Perttu Sippola +3 more | 2023-08-22 |
| 11615980 | Method and apparatus for filling a recess formed within a substrate surface | Viljami Pore | 2023-03-28 |
| 11342216 | Cyclical deposition method and apparatus for filling a recess formed within a substrate surface | Viljami Pore | 2022-05-24 |
| 11227789 | Method and apparatus for filling a recess formed within a substrate surface | Viljami Pore | 2022-01-18 |