Issued Patents All Time
Showing 1–25 of 42 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11993849 | Carbon hard mask, film forming apparatus, and film forming method | Masaru Hori, Hirotsugu Sugiura, Tsuyoshi Moriya, Satoshi Tanaka, Yoshinori Morisada | 2024-05-28 |
| 11339242 | Method for manufacturing semiconductor substrate having group-III nitride compound layer | Keisuke Hashimoto, Yasunobu Someya, Masaru Hori | 2022-05-24 |
| 11131134 | Hinge arm damper mechanism | Daisuke Takahashi | 2021-09-28 |
| 11118638 | Reverse input lock clutch | Daisuke Takahashi | 2021-09-14 |
| 11035809 | Thermal diffusion factor measurement device, thermal diffusion factor measurement method and program | Takaaki Awano, Kimihito Hatori, Takahiko Kubota, Hosei NAGANO, Ryohei FUJITA | 2021-06-15 |
| 9852892 | Microwave supply apparatus, plasma processing apparatus, and plasma processing method | Hitoshi Itoh, Masaru Hori, Hirotaka Toyoda, Haruka Suzuki | 2017-12-26 |
| 8610353 | Plasma generating apparatus, plasma processing apparatus and plasma processing method | Hitoshi Itoh, Hidenori Miyoshi, Masaru Hori, Hirotaka Toyoda | 2013-12-17 |
| 7202168 | Method of producing semiconductor device | Hiroshi Ikenoue, Hisashi Kaneko, Masaaki Hatano, Soichi Yamashita, Takashi Yoda | 2007-04-10 |
| 7169697 | Semiconductor device and manufacturing method of the same | Shoji Seta, Naofumi Nakamura | 2007-01-30 |
| 7138700 | Semiconductor device with guard ring for preventing water from entering circuit region from outside | Ryuji Tomita, Tetsuya Kurokawa, Takashi Ishigami, Manabu Iguchi, Kazuyoshi Ueno | 2006-11-21 |
| 6991878 | Photomask repair method and apparatus | Shingo Kanamitsu, Takashi Hirano, Fumiaki Shigemitsu, Motosuke Miyoshi, Kazuyoshi Sugihara +4 more | 2006-01-31 |
| 6849923 | Semiconductor device and manufacturing method of the same | Shoji Seta, Naofumi Nakamura | 2005-02-01 |
| 6831367 | Semiconductor device and method of manufacturing the same | — | 2004-12-14 |
| 6642149 | Plasma processing method | Tomoki Suemasa, Tsuyoshi Ono, Kouichiro Inazawa, Itsuko Sakai, Yukimasa Yoshida | 2003-11-04 |
| 6605542 | Manufacturing method of semiconductor devices by using dry etching technology | Shoji Seta, Naofumi Nakamura | 2003-08-12 |
| 6352931 | Manufacturing method of semiconductor devices by using dry etching technology | Shoji Seta, Naofumi Nakamura | 2002-03-05 |
| 6334928 | Semiconductor processing system and method of using the same | Nobuo Hayasaka, Katsuya Okumura | 2002-01-01 |
| 5950083 | Method for fabricating CMOS transistor with self-aligned silicide (salicide) structure | Ken Inoue | 1999-09-07 |
| 5937300 | Semiconductor apparatus and fabrication method thereof | Hidenobu Miyamoto, Ken Inoue | 1999-08-10 |
| 5897713 | Plasma generating apparatus | Kazuhiro Tomioka | 1999-04-27 |
| 5776557 | Method for forming a film on a substrate by activating a reactive gas | Haruo Okano, Sadahisa Noguchi | 1998-07-07 |
| 5776829 | Method for forming multilevel interconnections in a semiconductor device | Tetsuya Homma | 1998-07-07 |
| 5717294 | Plasma process apparatus | Itsuko Sakai, Keiji Horioka, Yukimasa Yoshida, Koichiro Inazawa, Masahiro Ogasawara +2 more | 1998-02-10 |
| 5661052 | Method of fabricating semiconductor device having low-resistance gate electrode and diffusion layers | Ken Inoue, Hirohito Watanabe, Ichirou Honma | 1997-08-26 |
| 5660744 | Plasma generating apparatus and surface processing apparatus | Keiji Horioka, Haruo Okano, Katsuya Okumura, Isahiro Hasegawa, Masaki Narita | 1997-08-26 |