Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11796910 | Template, manufacturing method of template | Kosuke TAKAI, Noriko SAKURAI | 2023-10-24 |
| 11762286 | Template manufacturing method and template base member | — | 2023-09-19 |
| 11294276 | Template manufacturing method and template base member | — | 2022-04-05 |
| 11061324 | Manufacturing method of replica template, manufacturing method of semiconductor device, and master template | Mana TANABE | 2021-07-13 |
| 10459355 | Template substrate and manufacturing method thereof | Masamitsu Ito | 2019-10-29 |
| 10274821 | Mask and manufacturing method of mask | Keiko Morishita | 2019-04-30 |
| 10241394 | Pattern formation method, control device, and semiconductor device manufacture method | Keiko Morishita, Hideaki Sakurai | 2019-03-26 |
| 9412592 | Imprint mask, method for manufacturing the same, and method for manufacturing semiconductor device | Masamitsu Itoh | 2016-08-09 |
| 9383641 | Method of repairing defect and method of manufacturing semiconductor device | — | 2016-07-05 |
| 9377682 | Template substrate, method for manufacturing same, and template | Masamitsu Itoh | 2016-06-28 |
| 8778572 | Photomask and pattern forming method | Kazuya Fukuhara | 2014-07-15 |
| 8758005 | Imprint mask, method for manufacturing the same, and method for manufacturing semiconductor device | Masamitsu Itoh | 2014-06-24 |
| 7947413 | Pattern evaluation method | Keiko Morishita | 2011-05-24 |
| 7927770 | Defect correction method for EUV mask | — | 2011-04-19 |
| 7569313 | White defect repairing method and apparatus of photomask, manufacturing method of photomask, and manufacturing method of semiconductor device | — | 2009-08-04 |
| 7541136 | Mask, manufacturing method for mask, and manufacturing method for semiconductor device | Kyoko Izuha, Hideki Kanai, Soichi Inoue, Shinichi Ito | 2009-06-02 |
| 7371483 | Method for manufacturing mask for focus monitoring, and method for manufacturing semiconductor device | Takashi Hirano, Kyoko Izuha, Soichi Inoue, Shinichi Ito | 2008-05-13 |
| 7094504 | Mask, manufacturing method for mask, and manufacturing method for semiconductor device | Kyoko Izuha, Hideki Kanai, Soichi Inoue, Shinichi Ito | 2006-08-22 |
| 6991878 | Photomask repair method and apparatus | Takashi Hirano, Fumiaki Shigemitsu, Motosuke Miyoshi, Kazuyoshi Sugihara, Yuichiro Yamazaki +4 more | 2006-01-31 |
| 6740456 | Method of correcting a photomask and method of manufacturing a semiconductor device | — | 2004-05-25 |
| 6335129 | Method for repairing pattern defect, photo mask using the method, and semiconductor device manufacturing method employing the photo mask | Mitsuyo Asano | 2002-01-01 |