Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11776823 | Substrate processing method and substrate processing apparatus | Kosuke TAKAI, Kenji Masui, Kaori Umezawa | 2023-10-03 |
| 11682566 | Processing apparatus for processing substrates of different types | Kosuke TAKAI, Hideaki Sakurai | 2023-06-20 |
| 11443963 | Substrate processing method and substrate processing apparatus | Kosuke TAKAI, Kenji Masui, Kaori Umezawa | 2022-09-13 |
| 11185895 | Substrate processing method, substrate processing apparatus, and composite processing apparatus | Hideaki Sakurai, Kosuke TAKAI, Kyo Otsubo, Minako Inukai | 2021-11-30 |
| 11123774 | Substrate processing method, substrate processing apparatus, and composite processing apparatus | Kosuke TAKAI, Hideaki Sakurai | 2021-09-21 |
| 11061324 | Manufacturing method of replica template, manufacturing method of semiconductor device, and master template | Shingo Kanamitsu | 2021-07-13 |