Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11651953 | Method for cleaning substrate and cleaning device | Minako Inukai, Hideaki Sakurai, Tetsuo TAKEMOTO | 2023-05-16 |
| 11264233 | Method for cleaning substrate and substrate processing apparatus | Hideaki Sakurai, Minako Inukai | 2022-03-01 |
| 11185895 | Substrate processing method, substrate processing apparatus, and composite processing apparatus | Mana TANABE, Hideaki Sakurai, Kosuke TAKAI, Minako Inukai | 2021-11-30 |
| 10882082 | Freeze cleaning apparatus | Hideaki Sakurai, Minako Inukai | 2021-01-05 |
| 10692715 | Method for cleaning substrate and substrate processing apparatus | Hideaki Sakurai, Minako Inukai | 2020-06-23 |
| 10486203 | Substrate production method, substrate processing apparatus, and substrate production system | Hideaki Sakurai, Kenji Masui, Tetsuo TAKEMOTO, Minako Inukai, Masato Naka | 2019-11-26 |