Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12172194 | Substrate processing apparatus and substrate processing method | Masatoshi Terayama | 2024-12-24 |
| 11833550 | Substrate processing apparatus and substrate processing method | Masatoshi Terayama | 2023-12-05 |
| 11651953 | Method for cleaning substrate and cleaning device | Hideaki Sakurai, Kyo Otsubo, Tetsuo TAKEMOTO | 2023-05-16 |
| 11264233 | Method for cleaning substrate and substrate processing apparatus | Kyo Otsubo, Hideaki Sakurai | 2022-03-01 |
| 11185895 | Substrate processing method, substrate processing apparatus, and composite processing apparatus | Mana TANABE, Hideaki Sakurai, Kosuke TAKAI, Kyo Otsubo | 2021-11-30 |
| 10882082 | Freeze cleaning apparatus | Hideaki Sakurai, Kyo Otsubo | 2021-01-05 |
| 10692715 | Method for cleaning substrate and substrate processing apparatus | Kyo Otsubo, Hideaki Sakurai | 2020-06-23 |
| 10486203 | Substrate production method, substrate processing apparatus, and substrate production system | Hideaki Sakurai, Kyo Otsubo, Kenji Masui, Tetsuo TAKEMOTO, Masato Naka | 2019-11-26 |
| 8961696 | Method and device for cleaning semiconductor substrate | Hiroshi Tomita, Hiaashi Okuchi, Linan Ji | 2015-02-24 |
| 8567420 | Cleaning apparatus for semiconductor wafer | Hiroshi Tomita, Kaori Umezawa, Yasuhito Yoshimizu, Linan Ji | 2013-10-29 |
| 8375964 | Template cleaning method, system, and apparatus | Hiroshi Tomita, Hisashi Okuchi | 2013-02-19 |
| 8114755 | Method of manufacturing semiconductor device | Ichiro Mizushima, Yoshio Ozawa, Takashi Nakao, Akihito Yamamoto, Takashi Suzuki +3 more | 2012-02-14 |