Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12172194 | Substrate processing apparatus and substrate processing method | Minako Inukai | 2024-12-24 |
| 11833550 | Substrate processing apparatus and substrate processing method | Minako Inukai | 2023-12-05 |
| 9841674 | Patterning method, and template for nanoimprint and producing method thereof | Hideaki Sakurai, Machiko SUENAGA, Takeharu MOTOKAWA | 2017-12-12 |
| 9116431 | Development processing apparatus | Hideaki Sakurai | 2015-08-25 |
| 8908150 | Substrate processing method, manufacturing method of EUV mask, and EUV mask | Hideaki Sakurai | 2014-12-09 |
| 8672563 | Development method, method of manufacturing photomask, method of manufacturing semiconductor device and development device | Hideaki Sakurai | 2014-03-18 |
| 8383298 | Substrate processing method, manufacturing method of EUV mask, and EUV mask | Hideaki Sakurai | 2013-02-26 |
| 8017287 | Development method, method of manufacturing photomask, and method of manufacturing semiconductor device | Hideaki Sakurai | 2011-09-13 |