Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11931923 | Method of manufacturing template and method of forming pattern | Hideaki Sakurai, Noriko SAKURAI, Ryu Komatsu | 2024-03-19 |
| 11789365 | Substrate processing method and substrate processing apparatus | Ryu Komatsu, Noriko SAKURAI, Hideaki Sakurai | 2023-10-17 |
| 11493846 | Pattern forming method and template manufacturing method | Noriko SAKURAI, Ryu Komatsu, Hideaki Sakurai | 2022-11-08 |
| 10811252 | Pattern-forming method | Ryosuke Yamamoto, Ryuichi Saito, Seiji Morita, Ryoichi Suzuki, Shinichi Ito +1 more | 2020-10-20 |
| 10111313 | Plasma processing apparatus and plasma processing method | Tokuhisa Ooiwa, Kensuke Demura, Tomoaki Yoshimori, Makoto Karyu, Yoshihisa Kase +1 more | 2018-10-23 |
| 9976948 | Phase separation observation method, phase separation observation apparatus, annealing apparatus, and producing method for substrate | — | 2018-05-22 |
| 9841674 | Patterning method, and template for nanoimprint and producing method thereof | Hideaki Sakurai, Machiko SUENAGA, Masatoshi Terayama | 2017-12-12 |
| 9507251 | Method for manufacturing reflective mask and apparatus for manufacturing reflective mask | Tomoaki Yoshimori, Makoto Karyu, Kosuke TAKAI, Yoshihisa Kase | 2016-11-29 |
| 8834674 | Plasma etching apparatus | Hidehito Azumano | 2014-09-16 |
| 8702901 | Method for manufacturing reflective mask and apparatus for manufacturing reflective mask | Tomoaki Yoshimori, Makoto Karyu, Kosuke TAKAI, Yoshihisa Kase | 2014-04-22 |