Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10111313 | Plasma processing apparatus and plasma processing method | Takeharu MOTOKAWA, Tokuhisa Ooiwa, Kensuke Demura, Makoto Karyu, Yoshihisa Kase +1 more | 2018-10-23 |
| 9507251 | Method for manufacturing reflective mask and apparatus for manufacturing reflective mask | Makoto Karyu, Takeharu MOTOKAWA, Kosuke TAKAI, Yoshihisa Kase | 2016-11-29 |
| 8702901 | Method for manufacturing reflective mask and apparatus for manufacturing reflective mask | Makoto Karyu, Takeharu MOTOKAWA, Kosuke TAKAI, Yoshihisa Kase | 2014-04-22 |
| 8406501 | Method and system for inspection of tube width of heat exchanger | Akihiro Daito, Kaoru Okazoe, Atsushi Fukumoto | 2013-03-26 |
| 8141619 | Fin inspection method of a heat exchanger | Akihiro Daito, Kaoru Okazoe, Atsushi Fukumoto, Saburou Nagaino | 2012-03-27 |
| 5846886 | Metal film etching method | Kei Hattori, Akira Kobayashi, Mikio Nonaka, Makoto Muto, Masaru Kasai +1 more | 1998-12-08 |