Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5846886 | Metal film etching method | Kei Hattori, Akira Kobayashi, Makoto Muto, Masaru Kasai, Toshiyasu Onoda +1 more | 1998-12-08 |
| 5201994 | Dry etching method | Hiroyuki Hara | 1993-04-13 |