Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6465363 | Vacuum processing method and vacuum processing apparatus | — | 2002-10-15 |
| 5846886 | Metal film etching method | Kei Hattori, Akira Kobayashi, Mikio Nonaka, Makoto Muto, Toshiyasu Onoda +1 more | 1998-12-08 |