Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10111313 | Plasma processing apparatus and plasma processing method | Takeharu MOTOKAWA, Tokuhisa Ooiwa, Kensuke Demura, Tomoaki Yoshimori, Yoshihisa Kase +1 more | 2018-10-23 |
| 9507251 | Method for manufacturing reflective mask and apparatus for manufacturing reflective mask | Tomoaki Yoshimori, Takeharu MOTOKAWA, Kosuke TAKAI, Yoshihisa Kase | 2016-11-29 |
| 8702901 | Method for manufacturing reflective mask and apparatus for manufacturing reflective mask | Tomoaki Yoshimori, Takeharu MOTOKAWA, Kosuke TAKAI, Yoshihisa Kase | 2014-04-22 |