Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12326660 | Pattern forming method, combined processing apparatus, and recording medium | Kosuke TAKAI | 2025-06-10 |
| 11931923 | Method of manufacturing template and method of forming pattern | Takeharu MOTOKAWA, Hideaki Sakurai, Ryu Komatsu | 2024-03-19 |
| 11796910 | Template, manufacturing method of template | Kosuke TAKAI, Shingo Kanamitsu | 2023-10-24 |
| 11789365 | Substrate processing method and substrate processing apparatus | Ryu Komatsu, Takeharu MOTOKAWA, Hideaki Sakurai | 2023-10-17 |
| 11493846 | Pattern forming method and template manufacturing method | Takeharu MOTOKAWA, Ryu Komatsu, Hideaki Sakurai | 2022-11-08 |
| 10809615 | Pattern forming method, master template, and method of manufacturing template | — | 2020-10-20 |
| 9029266 | Semiconductor device manufacturing method | Yusuke Kasahara | 2015-05-12 |
| 8487365 | Semiconductor device and method for manufacturing same | Toshiyuki Sasaki, Tokuhisa Ohiwa, Katsunori Yahashi | 2013-07-16 |
| 8211783 | Method for manufacturing semiconductor device including a patterned SiOC film as a mask | Katsunori Yahashi, Tokuhisa Ohiwa | 2012-07-03 |