Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11798806 | Pattern forming method and method for manufacturing semiconductor device | — | 2023-10-24 |
| 11735431 | Pattern formation method and semiconductor device manufacturing method | — | 2023-08-22 |
| 10964538 | Method of manufacturing semiconductor device | — | 2021-03-30 |
| 10847191 | Semiconductor device | — | 2020-11-24 |
| 10811268 | Substrate processing apparatus, substrate processing method, and semiconductor device fabrication method | Shinichi Ito, Seiji Morita, Ryosuke Yamamoto, Ryuichi Saito | 2020-10-20 |
| 10409157 | Pattern forming method | — | 2019-09-10 |
| 10366886 | Pattern forming method, self-organization material, and method of manufacturing semiconductor apparatus | Seiji Morita, Masahiro Kanno | 2019-07-30 |
| 9816004 | Lithography pattern forming method using self-organizing block copolymer | Ayako Kawanishi, Hiroki Yonemitsu | 2017-11-14 |
| 9696628 | Pattern forming method | Hideki Kanai | 2017-07-04 |
| 9685331 | Semiconductor device manufacturing method and pattern forming method | Ayako Kawanishi, Hiroki Yonemitsu | 2017-06-20 |
| 9371427 | Pattern forming method | Katsutoshi Kobayashi, Hiroki Yonemitsu, Hitoshi Kubota, Ayako Kawanishi | 2016-06-21 |
| 9252027 | Method of forming pattern, manufacturing method of semiconductor device and template | Kei Kobayashi | 2016-02-02 |
| 9029266 | Semiconductor device manufacturing method | Noriko SAKURAI | 2015-05-12 |
| 8642484 | Method for manufacturing semiconductor device | — | 2014-02-04 |
| 8536061 | Semiconductor device manufacturing method | Hisataka Hayashi, Tsubasa Imamura | 2013-09-17 |
| 8084360 | Method of manufacturing semiconductor device | Hisataka Hayashi | 2011-12-27 |