Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11806901 | Template, template manufacturing method, and semiconductor device manufacturing method | Kazuhiro Takahata, Toshiaki Komukai | 2023-11-07 |
| 10899994 | Method for producing polyunsaturated fatty acid-containing composition | Hiroyuki Ikemoto, Kenji Takemoto, Masataka Harata, Shingo Nonaka | 2021-01-26 |
| 10597607 | Method for producing polyunsaturated fatty acid-containing composition | Masataka Harata, Shingo Nonaka, Hiroyuki Ikemoto, Kenji Takemoto | 2020-03-24 |
| 9696628 | Pattern forming method | Yusuke Kasahara | 2017-07-04 |
| 9607887 | Method of manufacturing semiconductor device | — | 2017-03-28 |
| 9023222 | Pattern forming method | Ayako Kawanishi, Shinichi Ito, Hirokazu Kato, Shimon Maeda | 2015-05-05 |
| 8233695 | Generating image inspection data from subtracted corner-processed design data | Satoshi Usui, Koji Hashimoto | 2012-07-31 |
| 7912275 | Method of evaluating a photo mask and method of manufacturing a semiconductor device | Hiroki Yamamoto, Masamitsu Itoh, Osamu Ikenaga, Shoji Mimotogi, Yukiyasu Arisawa | 2011-03-22 |
| 7812972 | Reticle, apparatus for monitoring optical system, method for monitoring optical system, and method for manufacturing reticle | Takashi Sato, Masafumi Asano | 2010-10-12 |
| 7670755 | Photomask correcting method and manufacturing method of semiconductor device | — | 2010-03-02 |
| 7638244 | Method of correcting mask data, method of manufacturing a mask and method of manufacturing a semiconductor device | — | 2009-12-29 |
| 7541136 | Mask, manufacturing method for mask, and manufacturing method for semiconductor device | Kyoko Izuha, Soichi Inoue, Shingo Kanamitsu, Shinichi Ito | 2009-06-02 |
| 7432021 | Reticle, apparatus for monitoring optical system, method for monitoring optical system, and method for manufacturing reticle | Takashi Sato, Masafumi Asano | 2008-10-07 |
| 7399557 | Photomask correcting method and manufacturing method of semiconductor device | — | 2008-07-15 |
| 7094504 | Mask, manufacturing method for mask, and manufacturing method for semiconductor device | Kyoko Izuha, Soichi Inoue, Shingo Kanamitsu, Shinichi Ito | 2006-08-22 |
| 6915769 | Variable valve system for internal combustion engine | Satoshi Yoshikawa | 2005-07-12 |
| 6165907 | Plasma etching method and plasma etching apparatus | Ikuo Yoneda, Shinichi Ito | 2000-12-26 |
| 6165692 | Method for manufacturing a semiconductor device and an exposure mask used therefor | Shinichi Ito | 2000-12-26 |
| 6159642 | Exposure mask and method of manufacturing thereof, and pattern data generating method for an exposure mask | Kenji Kawano, Shinichi Ito, Satoshi Tanaka, Soichi Inoue, Ikuo Yoneda | 2000-12-12 |
| 5792376 | Plasma processing apparatus and plasma processing method | Ikuo Yoneda, Masamitsu Itoh | 1998-08-11 |