Issued Patents All Time
Showing 1–25 of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12058835 | Information processing apparatus and cooling method | Kiichi Koyama, Tatsuya Sudo, Kazuo Tanaka, Hirotaka Shikada, Hiroshi Nagaoka +4 more | 2024-08-06 |
| 11106128 | Method for designing mask set, recording medium, template, and method for manufacturing template | Shinichiro Nakagawa | 2021-08-31 |
| 10114284 | Method for designing mask set, recording medium, template, and method for manufacturing template | Shinichiro Nakagawa | 2018-10-30 |
| 10040219 | Mold and mold manufacturing method | Yoko Takekawa, Ryouichi Inanami, Kazuhiro Takahata, Sachiko Kobayashi, Shigeki Nojima +3 more | 2018-08-07 |
| RE46390 | Pattern forming method, processing method, and processing apparatus | Ryoichi Inanami, Masayuki Hatano | 2017-05-02 |
| 9433967 | Pattern inspection method, pattern formation control method, and pattern inspection apparatus | — | 2016-09-06 |
| 8871408 | Mask pattern creation method, recording medium, and semiconductor device manufacturing method | Yoko Takekawa, Yingkang Zhang, Kazuhiro Takahata, Tomoko Ojima | 2014-10-28 |
| 8722535 | Pattern forming method, mold and data processing method | — | 2014-05-13 |
| 8420422 | Pattern forming method, processing method, and processing apparatus | Ryoichi Inanami, Masayuki Hatano | 2013-04-16 |
| 8381138 | Simulation model creating method, computer program product, and method of manufacturing a semiconductor device | Tetsuaki Matsunawa, Shoji Mimotogi | 2013-02-19 |
| 8055366 | Simulation model creating method, mask data creating method and semiconductor device manufacturing method | Shoji Mimotogi | 2011-11-08 |
| 7982155 | System of testing semiconductor devices, a method for testing semiconductor devices, and a method for manufacturing semiconductor devices | — | 2011-07-19 |
| 7979154 | Method and system for managing semiconductor manufacturing device | Hiroshi Matsushita, Junji Sugamoto | 2011-07-12 |
| 7970486 | Method for controlling semiconductor manufacturing apparatus and control system of semiconductor manufacturing apparatus | Hiroshi Matsushita, Junji Sugamoto | 2011-06-28 |
| 7930123 | Method, apparatus, and computer readable medium for evaluating a sampling inspection | Takahiro Ikeda | 2011-04-19 |
| 7883824 | Method for evaluating lithography apparatus and method for controlling lithography apparatus | Kenji Yoshida, Masahiro Kanno | 2011-02-08 |
| 7855047 | Reticle set, method for designing a reticle set, exposure monitoring method, inspection method for reticle set and manufacturing method for a semiconductor device | Tadahito Fujisawa, Satoshi Tanaka | 2010-12-21 |
| 7812972 | Reticle, apparatus for monitoring optical system, method for monitoring optical system, and method for manufacturing reticle | Takashi Sato, Hideki Kanai | 2010-10-12 |
| 7756656 | Measurement coordinate setting system and method | — | 2010-07-13 |
| 7742834 | Management system of semiconductor fabrication apparatus, abnormality factor extraction method of semiconductor fabrication apparatus, and management method of the same | Hiroshi Matsushita, Junji Sugamoto | 2010-06-22 |
| 7655369 | Reticle set, method for designing a reticle set, exposure monitoring method, inspection method for reticle set and manufacturing method for a semiconductor device | Tadahito Fujisawa, Satoshi Tanaka | 2010-02-02 |
| 7629550 | System of testing semiconductor devices, a method for testing semiconductor devices, and a method for manufacturing semiconductor devices | — | 2009-12-08 |
| 7537869 | Evaluation of pattern formation process, photo masks for the evaluation, and fabrication method of a semiconductor device with the evaluation process | Kazuya Fukuhara | 2009-05-26 |
| 7510341 | Temperature calibration method for baking processing apparatus, adjustment method for development processing apparatus, and method of manufacturing semiconductor apparatus | Kei Hayasaki, Daizo Mutoh, Tadahito Fujisawa, Tsuyoshi Shibata, Shinichi Ito | 2009-03-31 |
| 7476473 | Process control method, a method for forming monitor marks, a mask for process control, and a semiconductor device manufacturing method | — | 2009-01-13 |