Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12386254 | Template, method for manufacturing template, and method for manufacturing semiconductor device | Kazuya Fukuhara | 2025-08-12 |
| 12204251 | Pattern generation method, template, and method for manufacturing template | — | 2025-01-21 |
| 12198976 | Template, method of manufacturing template, and method of manufacturing semiconductor device | — | 2025-01-14 |
| 12087604 | Template, manufacturing method of template, and manufacturing method of semiconductor device | — | 2024-09-10 |
| 11806901 | Template, template manufacturing method, and semiconductor device manufacturing method | Toshiaki Komukai, Hideki Kanai | 2023-11-07 |
| 11762285 | Template, patterning method, and method for manufacturing semiconductor device | Anupam Mitra, Masaki Mitsuyasu, Kazuya Fukuhara, Sachiko Kobayashi | 2023-09-19 |
| 11316181 | Fuel cell unit structure and method of controlling fuel cell unit structure | Motoki Yaginuma | 2022-04-26 |
| 11139486 | Fuel cell stack having separators with protrusions | Keiji Ichihara | 2021-10-05 |
| 10796948 | Pattern forming method and imprint apparatus | Anupam Mitra, Tetsuro Nakasugi | 2020-10-06 |
| 10274822 | Template and method of manufacturing semiconductor device | Anupam Mitra, Motofumi Komori | 2019-04-30 |
| 10192741 | Device substrate, method of manufacturing device substrate, and method of manufacturing semiconductor device | Takahito Nishimura, Yoshihisa Kawamura, Ikuo Yoneda, Yoshiharu Ono | 2019-01-29 |
| 10040219 | Mold and mold manufacturing method | Yoko Takekawa, Ryouichi Inanami, Masafumi Asano, Sachiko Kobayashi, Shigeki Nojima +3 more | 2018-08-07 |
| 9941137 | Substrate planarizing method and dropping amount calculating method | Eiichi Soda | 2018-04-10 |
| 9793120 | Device substrate, method of manufacturing device substrate, and method of manufacturing semiconductor device | Takahito Nishimura, Yoshihisa Kawamura, Ikuo Yoneda, Yoshiharu Ono | 2017-10-17 |
| 8871408 | Mask pattern creation method, recording medium, and semiconductor device manufacturing method | Yoko Takekawa, Masafumi Asano, Yingkang Zhang, Tomoko Ojima | 2014-10-28 |
| 8183119 | Semiconductor device fabrication method using multiple mask patterns | Koji Hashimoto, Soichi Inoue, Kei Yoshikawa | 2012-05-22 |
| 8163611 | Semiconductor device fabrication method and semiconductor device | Koji Hashimoto, Soichi Inoue, Kei Yoshikawa | 2012-04-24 |
| 8158527 | Semiconductor device fabrication method using multiple resist patterns | Koji Hashimoto, Soichi Inoue, Kei Yoshikawa | 2012-04-17 |
| 7824996 | Semiconductor device fabrication method and semiconductor device | Koji Hashimoto, Soichi Inoue, Kei Yoshikawa | 2010-11-02 |
| 7208423 | Semiconductor device fabrication method and semiconductor device | Koji Hashimoto, Soichi Inoue, Kei Yoshikawa | 2007-04-24 |