Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11282723 | Liquid delivery member, liquid delivery apparatus, and semiconductor device manufacturing method | Hironobu Tamura, Ikuo Yoneda | 2022-03-22 |
| 11164843 | Substrate bonding apparatus | Hironobu Tamura | 2021-11-02 |
| 10192741 | Device substrate, method of manufacturing device substrate, and method of manufacturing semiconductor device | Takahito Nishimura, Yoshihisa Kawamura, Kazuhiro Takahata, Ikuo Yoneda | 2019-01-29 |
| 9793120 | Device substrate, method of manufacturing device substrate, and method of manufacturing semiconductor device | Takahito Nishimura, Yoshihisa Kawamura, Kazuhiro Takahata, Ikuo Yoneda | 2017-10-17 |
| 9153984 | Charging device | Tsutomu Tanaka, Mamoru Mochizuki, Takashi Makita | 2015-10-06 |
| 8671773 | Electronic flow meter | Osamu Karino, Yoshihiro Shimizu, Yoshihiro Miyagawa, Hiroyuki Kawajiri, Takehiro Furukawa | 2014-03-18 |
| 8092703 | Manufacturing method of semiconductor device | Takeo Ishibashi, Kazumasa Yonekura, Masahiro Tadokoro, Kazunori Yoshikawa | 2012-01-10 |
| 7066131 | Cylinder head | Satoru Goto, Sadao Nakayama | 2006-06-27 |
| 7066164 | Engine, engine exhaust temperature controlling apparatus, and controlling method | Satoru Goto, Yoshifumi Nishi, Sadao Nakayama | 2006-06-27 |
| 7030007 | Via-filling material and process for fabricating semiconductor integrated circuit using the material | Teruhiko Kumada, Toshiyuki Toyoshima, Hideharu Nobutoki, Takeo Ishibashi, Junjiro Sakai | 2006-04-18 |
| 6555790 | Semiconductor manufacturing apparatus, method for cleaning the semiconductor manufacturing apparatus, and light source unit | Sachiko Hattori, Yuko Odamura | 2003-04-29 |